LG16 Liquid Flow Meter Series Compact Liquid Flow Meter for OEM Applications ■ Liquid flow rates up to 5000 pl/min ■ Resolutions down to sub nl/min ■ Totally non-invasive, pressures up to 200 bar ■ Digital I2C interface or analog out 0-5 V Product Summary The LG16 Liquid Flow Meter series enables fast, non-invasive measurements of very low liquid flow rates below 5 ml/min. This product line is especially suited for OEM volume applications requiring small sized components with high performance at low cost. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the LG16 Liquid Flow Sensor is formed by a straight-thru glass capillary and end fittings. There are no obstacles in the flow path. Interface Options Digital Analog For more information on communication, please refer to section 3 of this document. 1 Sensor Performance Table 1: Model specific performance of LG16 (all data for medium H Corresponds with 4.8 V in analog version bFlow rate at which the sensor output saturates. See section 2 for performance between full scale and saturation point. 'Measured value dMaximum additional offset when mounted vertically eNon-condensing, flow path empty www.sensirion.com Version 4 - March 2016 1/8

Table 2: Model specific performance of LG16, digital version only (all data for medium IPA, 23 °C, 1 barabs unless otherwise noted) _ ____ Analog flow meter variants only feature H2O calibration. For communication with the analog variant see section 3.4. www.sensirion.com Version 4 - March 2016 2/8

Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) Flow rate (pl/min H20) Flow rate (ul/min H20) Flow rate (ul/min H20) Flow rate (pl/min H20) 1000 Flow rate (ul/min H20) www.sensirion.com Version 4 - March 2016 3/8

Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) Accuracy (% of measured value) LG16-0150 Absolute Accuracy with IPA Figure 2: Flow meter accuracy and repeatability across the flow range. Relative error in % of measured value (left column) and absolute error in pl/min or ml/min (LG16-2000-HC) (right column) for IPA. www.sensirion.com Version 4 - March 2016 4/8

Communication with the Sensor Parameter The OEM flow sensor LG16 shows bi-directional, linear transfer characteristics. It can be ordered as analog or digital output version. Please see the following section for more details and the table on page 7 for an overview of the available options. Digital sampling time, 16 bit 74 ms Digital sampling time, 9 bit 1 ms 3.3 Digital Communication via I2C-Bus Digital communication between a master and the LG16 sensor runs via the standard I2C-interface. The physical interface consists of two bus lines, a data line (SDA) and a clock line (SCL) which need...

4 Fluidic Connection Table 5: Fluidic Specifications and Pressure Rat a1/8” OD tubing with 2 mm minimum ID is recommended for the LG16-2000. For more information on the fluidic connection please find: “Application Note Sensor Ports and Tubing Connections” in the Download Center on our webpage (www.sensirion.com/liquidflow-download). 5 Mechanical Specifications Table 6: Mechanical Specifications

6 Ordering Information Each model is available with an analog output (ending "A”) or with a digital output (ending "D”). Standard shipment includes only the sensor, neither cables for electrical connection nor fluidic connection material are included. Preassembled 5-pin Molex to pigtail ribbon cables (Molex 1.25 mm Pitch Receptacle Type 51021-0500 (PicoBlade™ 51021), 30 cm) can be ordered optionally.

Important Notices Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury (including death). Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the datasheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized application, Buyer...