Flow Meter SLQ-HC60 for Hydrocarbons
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Preliminary Datasheet SLQ-HC60 Milliliter Flow Meter for Hydrocarbons - Maximum flows up to 80 ml/min - Sensitive to lowest flows - Straight flow path, no moving parts - Fast response time: < 50 ms - Optimized for hydrocarbons 1 Introduction SLQ-HC60 The SLQ-HC60 Liquid Flow Meter enables fast, non invasive measurements of liquid flow up to 80 ml/min. This product line is especially suited for process monitoring applications in automation technology which require high sensitivity in the milliliter range. It is suited for use with almost all hydrocarbons, as for example, alcohols, oils, gasoline, diesel, etc. and many other chemicals. Excellent chemical resistance is ensured: The flow path of the SLQ-HC60 Liquid Flow Meters is formed by a simple, straight glass capillary. This Swiss made, non invasive flow meter is based on Sensirion's patented CMOSens® Technology (US Patent 6,813,944 B2). An internal fourth generation MEMS sensor chip combines a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip - the product's core element. 2 Sensing Performance In Table 1 the flow sensor's performance for use with Isopropyl Alcohol (IPA) is given. For other hydrocarbons the values will be slightly different as the performance depends on the medium used. Due to the optimized output signal the repeatability is nearly constant over a wide flow range. The repeatability depends on the integration timea of the analog signal acquisition. Longer integration time leads to better repeatability of the flow measurement (see table 1). The temperature compensation is optimized for use with IPA and shows very good performance for most hydrocarbons and other media. Table 1 : Model specific performance of SLQ-HC60 for IPA (all data at 20°C, 1 barabs unless otherwise noted) Parameter Condition SLQ-HC60 Units Maximum Flow Rate Best Performance 80 ml/min Reduced Performance 100 0.2 sec integration time 1.5 % m.v. Repeatabilityb 0.2 % F.S. (whichever is greater) 2 sec integration time 1 % m.v. 0.07 % F.S. Flow Detection Response Time < 50 ms Accuracyc 10 % m.v. Response Time On Power-Up 120 ms Mounting Orientation Sensitivityd For IPA 0.25 ml/min Operating Temperature Temperature Compensated +10...+40 °C Functional +0 ... +55 °C Ambient storage temperature (empty flow channel) -10...+60 °C a This refers to the time over which the analog acquisition device averages the input signal. Refer to the datasheet of your device. b For medium IPA using 1 a standard deviation of consecutive flow measurements. c With IPA, 2.5-80 ml/min, after conversion of the Vout signal via the logarithmic relation. See section 3.1 d Normal position: Horizontal Flow channel, connector horizontally. www.sensirion.com May 2009 Preliminary Information _ V0.83 1/6

SENSIRION SLQ-HC60 Milliliter Flow Sensor thg sensor company 3 Output Signal and Media Compatibility 3.1 Output Signal The SLQ-HC60 flow meter comes with an analog output (0...10V). Depending on the media used, the output will be about 5 Volt at zero flow. For positive flow rates the output signal increases logarithmicallya with the flow rate for IPA (see figure 1). This signal characteristic has the advantage that the flow meter can be used at various flow rates with a constant relative error and makes measurements for a wide spectrum of liquids possible. o o > ---------------------9 8 7 6...

SENSIRION SLQ-HC60 Milliliter Flow Sensor thg sensor company 3.4 Exchangeability Every SLQ-HC60 is calibrated for IPA. This makes the sensors also exchangeable for use with other media, meaning that once the sensors are characterized for a particular medium the same values can be used for further sensors. Depending on the media, variations between sensors of 6- 20% are typical. 4 Cleaning Due to the measurement principle the sensor is sensitive to deposits on the inside of the sensor's capillary. Especially when changing from one liquid to another sufficient cleaning steps have to be...

SNSIRION SLQ-HC60 Milliliter Flow Sensor the sensor company 5.4 Mechanical Sp)cifications and Pressure Rating Table 3: Mechanical Spcifications and Pressure Rating Parameter SLQ-HC60 Fluid Connector Standard (Fittings) %-28 flat bottom port for 1/8", 3mm OD tubing Wetted Materials: Internal Sensor Capillary Material Duran® (borosilicate glass 3.3) 镕 Fitting Material 100% PEEK (polyetheretherketone) ٕ Additional Sealing Material Tefzel® (ETFE) Overpressure Resistance 3 bar 45 psi Maximum Pressure Drop (at 80 ml/min flow rate for IPA) 40 mbar Internal Sensor Capillary, Inner Diameter 1.8 mm...

SLQ-HC60 Milliliter Flow Sensor 8 Important Notices 8.1 Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or...

SLQ-HC60 Milliliter Flow Sensor Headquarter and Sales Office SENSIRION AG Laubisruetistr. 50 CH-8712 Staefa ZH Switzerland Phone: +41 44 306 40 00 Fax: +41 44 306 40 30 info@sensirion.com http://www.sensirion.com SENSIRION Korea Co. Ltd. #1414, Anyang Construction Tower B/D, 1112-1, Bisan-dong, Anyang-city, Gyeonggi-Province, South Korea Phone: +82-31-440-9925~27 Fax: +82-31-440-9927 info@sensirion.co.kr http://www.sensirion.co.kr SENSIRION Inc. Westlake Pl. Ctr. I, suite 204 2801 Townsgate Road Westlake Village, CA 91361 USA SENSIRION Japan Sensirion Japan Co. Ltd. Shinagawa Station Bldg....