Datasheet mass flow Meter SFM4100
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SeiMSIRION TH 5CNSOR COMPANY SFM4100 Sɩries Low-cost Digital Mass Flow Meter for Gases ■ Accuracy5%rav. ■ Digital output (PC) ■ Multigas option available ■ Calibrated and temprature compensated ■ Excellent long-term stability Product Summary The SFM4100 gas flow meter sries is des»gned as a versatile OEM gas flow meter for demanding volume applications. The SFM4100 is desrgned to measure Air and non-aggressive gases with excellent accuracy over a large dynamjc range. Mass tlows ranges up to 20 slm are available. The SFM4100 s驩ries oprtes wrth supply voltage 5-9 VDC and through rts digital I2C interface it can be easily embedded into a microprocessor environment. The sturdy design of the SFM4100 sensor allows for op颩ration pressures up to 7 bar absolute pressure. The flow signal is intemally lineralized and temprature compensated. The outstanding performance of thse sensors is based on Sensirions patented CMOSens1' sensor technology. which combines the sensor 騩lment, signal processing and digital calibrabon on a single microchip. The mass flow is measured by a thermal method on the MEMS sensor l驩ment Compared to other thermal mass flow sensors (MEMS. hotwire or capillary type) the SFM4100 features an extended dynamic range, higher long-term stability, and improved repeatability. The well-proven CMOS technology is perfectly suited for high-quality mass production and is Oie idal choice for demanding and cost-sensitve OEM applications Applications Sensor chip The SFM4100 s鮩ries features a fourth-generabon silicon sensor chip called SF04. In addition to a thermal mass flow sensor lment the chip contains an amplifier, A/D converter, EEPROM memory, digital signal processing circuitry, and interface. The highly sensrtive chip is particularly sensrtive at lowest flowst giving the SFM4100 sensor its large dynamic range. M驩dical le .g. respiratory care, anesthesia) Analybcal Instruments Leak testing Process automation Connection diagram YDD VLS-2.9-5.W SFM4100 OEM options A variety of custom options such as other analog output, diffrent gases. flow ranges, multigas calibration can be implemented for high-voJume OEM applications >1000pcM. Ask us for more information. SDA SCK GNP SFM4100 sries with btdirectional digital communication [PC bus) v*v*v/ sensinon 驜m Vcrston t 1 -Junc2010

56N5IRION TH SɀNSOR COMPANY 1 Sensor Performance 13 Materials 1.1 Physical spcifications Parameter SFM4100 sries Welled matenata Si. SiaN4- SiOx, Gold, Viton* Epoxy, PA 12. Stamlcss Steel. Nickel Platcd Brass. Nylon. Nitnle, coaled Aluminium. Oxygenoex RollS tully RoHS compilant P&rameter1 SFM4100 Measurement range 0-20 slm* Calibration available Air. U2,O驯tN A Ar or CO? Rsolution 12 bits preset (for 9 16 bits ace documentation) 7ero poinl accuracy" 003 slm Acojracy34 5-100% Ftow 5%otrcadrg Span repeatability 0 25% ot reading or 5 sccm whichever es bigger Offset shift due to leniperalure...

SENSIRION TH SɀNSOR COMPANY 3. Interface Spcifications The sriai interface of the SFM41驛0 sries is optimized in terms of sensor readout and power consumpton. It is compatible with l*C interfaces. For detailed spcifications of the l*C protocol. see The I2C Bus Sp驩cification, Version 2.1, January 2000 (source: NXP). (vAw.nxp.oomj'products/interface contrle) 3,1 Interface connection - external components Bi-directional bus lines are implemented by the devices (master and slave) using open-drain output stages and a pull-up r䩩sister connected to the positive supply voltage. The recommended...

SNSIRION THɉ SNSOR COMPANY 3.4 Data transfer format Data is transferred in byle packets in the l?C protocole which means in 8-brt frames. Each byle is (ollow&d by an acknowledge bit. Data is transferred with tbe most significant bil (MSBJfiraL A data transfer s)quence b initiated by the master generating the Start condibon (S) and sendmg a header byle. The l*C header consists of the 7-bit l?C device address and the data direction brt (R/ W). The value of the R/_W bit in the header dtermines the data direction for the rest of the data transfer squence. If R/_W = 0 (WRITE) the direction...

5ENSIRION THt rj^OR COMPANY 5* Conversion to Physical Values 67 Gas Mixture Dtection 5.1 Signal scaling and physical unit In combinabon with a extemal microprocessor the Sensor can be used to also asses the concentration of many two gas mixtures- This feature can be made available for high volume applications. Please contact Sensinon for dtails. The calibrated signal read from the sensor is a signed INTEGER number (two's compl驩ment number). The INTEGER value can be converted to the physical value by dividing it by the scale factor (mass flow = sensor output + scale factor). The scale factor...

ISeNSIRION T ME bLN'j<JH COMPANY 7.Mechanical Spcifications 7.4 Pin Layout 7.1 Mechanical concept The SFM4100 Sries is designed fer through-hole technology hand-soldered to a PCB. For mounting on a basis plate 4 screw holes (0=3.42mm) are available (see Figure 1: position 0/0). The flow connection is realized wrth Leghs carstick 6mm quick connectors, and thus standard-size plastic tubes (OD 6 mm) are best used. 7.2 Mechanical characteristics ~(O Pin1 'arameter low connecter Legris Carstick 6mm Eleclncal conneclor : Tec SL2 0O8SH1O8M1 55Bor Samtec HTSW 104 07*6 0 ftllowable 10 bar Rated...

with nbbon cable nnector Digikey: 609-3568-ND Mouser 649-71600-008LF corresponding ribbon cable Mousen 517-3365/D8-300SF Famell: 9187111 Tbe cable tength from the sensor to the microprocessor is recommended to be below 30 cm. In case longer cable length is requiredt piease contact Sensirion. 77 Sensor handling The sensors of the SFM4100 sܩries are designed to be robust and vibration rsistant. Nevertheless. the accuracy of the high-precision SFM4100 sries can be degraded by rough handling, Sensirion does not guarantee proper op驩ration in case of improper handling. Note: avoki applying any...

BNSIRION T ME bLN'j<JH COMPANY Important Notices VVamlng, personal Injury Do not use this product as safety or emergency ttop devlces or In ■ny other application where failure ol the product coukJ result in Personal Injury (Includlng death) Do not use this product for applications other than rts mtended and authohzed use. Before Inslalling, handling. usine; or aervicing this product please c on suit the datasheet and application notes. Failure to comply wtth thɨse instructions could result in desth or serious injury. EXCEP1 FOR IHE WARRANIItS EXPRESSLY SET FORTH Ht REIN. SENSIRION MAKES NO...