Datasheet Mass Flow Controller SFC3000 for Gases
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CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SENSIRION th sensor company High performance digital Mass Flow Controller CMOSens® technology with unbeatable price/performance ratio For high-volume OEM applications Fully digital (interface, control, calibration & temperature compensation) Small size, manifold mountable Multigas option (switchable by software) NIST traceable calibration - Information November 2008 - v1.6 CMOSens® SFC3000 Product Summary The CMOSens® SFC3000 family offers fully digital Mass Flow Controllers, Mass Flow Meters, and Pressure Controllers for analytical instruments featuring an RS485 interface. Its leading performance is based on Sensirion's unsurpassed CMOSens® sensor technology which combines a high precision sensor element with the amplification and A/D converter circuit on one single CMOS chip. The analog sensor signal is converted directly on the CMOSens® chip into digital calibrated and temperature compensated signal which is used in a microprocessor running a sophisticated controlling algorithm. This results in very high flexibility, ultra-high stability and repeatability over a large dynamic range. Different gas types and control ranges can be switched by software, even during operation. The SFC3000 provides a standard digital RS485 hardware interface for setting and reading flows. It requires a standard supply voltage of +15 VDC. The MFC can be operated at input pressures of up to 10 bar (145 psi). www.sensirion.com Sensirion - the sensor company

CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SENSIRION th sensor company 1 Technical concept Setpoint / Measured Flow RS485 Microprocessor with digital control algorithm Controlled Mass Flow $ CMOSens® Chip Input pressure P1 Digital linearisation & temperature compensation (On-Chip) linearised & temperature compensated signal raw data from the on-chip sensor Figure 1: Block Diagram CMOSens® SFC3000 Mass Flow Controller. Due to the digital RS485 interface up to 255 SFC3000 mass flow controller can basically be connected through one bus interface. Using a typical standard flat...

SENSIRION CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases_ the sensor company 2 Specification of the Control Units 2.1 Versatile Mass Flow Controller Feature SFC3100 - typical specifications Notes Fluids N2 / He / H2 / Ar Other dry and clean media on request Flow ranges SFC3100 0-200 sccm Possibility to have several gases and ranges calibrated in one unit with mode selection by software. Other flow ranges subject to discussion. Accuracy 2% of set point Over range 1:40, for flows >10 sccm. ±0.2 sccm for flows <10 sccm. Temperature dependency 15 - 20°C Add temp. coefficient as...

CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SeNSIRION th sensor company 3 Electrical Specifications and Interface 3.1 Interface Hardware Hardware interface is a standard RS485, on a SubD-9 (male connector at Sensirion device). For connector pin-out and footprint see chap 4.1 3.2 Interface Software Easy software protocol (RS485-FKE protocol). Contact Sensirion AG for further information. 3.3 Power Supply Ratings Min Nominal Maximum Unit +15 Vdc supply voltage Ripple on +15 Vdc at max. current 14.25 15 15.75 0.5 Vdc Vpp 3.4 Current Rating Device Min Typical (normal operation)...

CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SeNSIRION th sensor company 4 Physical Dimensions and Mounting Information 4.1 SFC3100 4.1.1 Footprint and Mechanical Dimensions Propos)e! O-Rings for Customer Manifold: - ID: 1/8", OD: 1W" ;W: 1/16" - ID: 3mm, OD: 6mm ; W: 1.5mm Proposed Screws for Mounting the MFC: 3x screws M4 FlowOut Flow In I I Connector Pin (D-Sub9) 1 : not connecte! 2: GND 3: +15 V 4: RS 232T 5: RS 232-R 6: RS 485-Y 7: RS 485-Z 8: RS 485-B 9: RS 485-A Ail dimensions in mm Note O-Ring for sealing the flow inlet/outlet has to be in the customer manifold....

SENSIRION CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases_ the sensor company 5 Ordering information 5.1 Order code for SFC3000 Mass Flow Controllers: If available provide the complete product code as written on the product e.g. SFC3100 UAGS2V N2 300 mln/min If the complete product code is not known, provide the following information: 1. Product base code (typically SFC3100 UAGS2V) 2. Gas type (for available gas types see Table 2) 3. max. flow range with required flow unit (for available flow units see Table 2) Example 1: SFC3100 UAGS2V N2 200 mln/min, He 100 mln/min, Ar 50...

CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SENSIRION th sensor company Important Notices Warning, personal injury Do not use this product as safety or emergency stop device or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use...

CMOSens® SFC3000 Digital OEM Mass Flow Controller for Gases SENSIRION th sensor company FCC and CE Statement The SFC3000 product has been tested and found to comply with the limits for a Class B digital device, pursuant to part 15 of the FCC Rules (FCC CFR 47). These limits are designed to provide reasonable protection against harmful interference in a residential installation. This equipment generates, uses and can radiate radio frequency energy and, if not installed and used in accordance with the instructions, may cause harmful interference to radio communications. However, there is no...