Datasheet Liquid Flow Sensor SLI
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Catalog excerpts

Datasheet Liquid Flow Sensor SLI - 1

SLI Liquid Flow Meter Media Isolated Microfluidic Flow Meter Totally Non Invasive Digital RS485 Interface High Speed Flow Measurement 1 Introduction SLI Flow Meter The SLI Liquid Flow Meter series enables fast, non-invasive measurements of very low liquid flow in the ml-range. Excellent chemical resistance and bio-compatibility are ensured: The flow path of the SLI Liquid Flow Meters is formed by a simple, straight glass capillary. The Swiss made, non-invasive sensors are based on Sensirion’s patented CMOSens® Technology (US Patent 6,813,944 B2). The fourth generation MEMS sensors combine a thermal high precision sensor element with amplification circuits and digital intelligence for linearization and temperature compensation on one single microchip – the products core element. Table 1: Specifications of SLI for H2O Parameter Maximum Flow Rate Lowest Calibrated Flow (LCF) Accuracy above LCF Operating Temperature Digital Interface Power Supply DC, VDD Overpressure Resistance (all data for medium H2O, 20°C, 1 barabs unless otherwise noted) Table 2: Specifications of SLI for hydrocarbon based liquids (comparable with oil, solvents, fuel, alcohol) (all data for medium Isopropyl Alcohol, 20°C, 1 barabs unless otherwise noted) SLI-0430 SLI-1000 SLI-2000 Parameter Maximum Flow Rate (depend on specific liquid type) Lowest Calibrated Flow (LCF) Accuracy above LCF Output Signals The flow meter offers a RS485 interface option with bus capability. This interface is embedded in the RS485 Sensor Cable that comes together with the sensor if ordered accordingly. For the detailed specifications of the RS485 communication interface, refer to the documents for the RS485 Sensor Cable. It is not possible to replace the Sensor Cable with a standard cable. The SLI Flow Meter can be switched to two different measurement modes by using RS485 commands: measurement mode with calibration for bi-directional flow measurement of water measurement mode for hydrocarbon based liquids, calibrated for Isopropyl Alcohol (IPA) a b Measured value Extension possible on request

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Datasheet Liquid Flow Sensor SLI - 2

SLI Liquid Flow Meter Table 3: Specifications of SLI Flow Meters (all data for medium H2O, 20°C, 1 barabs unless otherwise noted) SLI-0430 SLI-1000 SLI-2000 Parameter Sensing Performance Maximum Flow Rate Lowest Calibrated Flow (LCF) Digital Resolution at LCF (16 bit) Accuracy a above LCF Accuracy below LCF Signal Noise, 16 bit Resolution - at LCF at Maximum Flow Rate Temperature Coefficient Mounting Orientation Sensitivity c Flow Detection Response Time τ63 - Response Time Response Time On Power-Up Operating Temperature Ambient storage temperature µl/min µl/min nl/min % of m.v. b % of full...

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Datasheet Liquid Flow Sensor SLI - 3

SLI Liquid Flow Meter Physical Dimensions Ordering Information For OEM applications the sensor can be purchased in larger quantities without any additional parts. For laboratory use and technology evaluation, the FlowMeterKit SLI-xxxx can be ordered. This laboratory-package contains - Liquid Flow Meter SLI-0430/1000/2000 - Fitting Material for 1/8’’ tubing - PC Software (Viewer & Data Export Tool) - Data Cable RS485 with USB Adapter - A/C Adapter (110…230 V, 50..60Hz) Product SLI-0430 (RS485 pigtail incl.) SLI-1000 (RS485 pigtail incl.) SLI-2000 (RS485 pigtail incl.) FlowMeterKit SLI-0430...

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Datasheet Liquid Flow Sensor SLI - 4

SLI Liquid Flow Meter Important Notices 7.1 Warning, personal injury Do not use this product as safety or emergency stop devices or in any other application where failure of the product could result in personal injury. Do not use this product for applications other than its intended and authorized use. Before installing, handling, using or servicing this product, please consult the data sheet and application notes. Failure to comply with these instructions could result in death or serious injury. If the Buyer shall purchase or use SENSIRION products for any unintended or unauthorized...

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