UHV NANOPROBE
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UHV NANOPROBE Four Independent Scanning Probe Microscopes 4-Point Transport Measurements on Nanostructures Electrical Contacting of Nanodevices STM-Based Safe & Non-Destructive Tip Approach Full STM Capability High-Resolution, < 4 nm SEM Imaging for Rapid Tip Navigation • High-Resolution, < 10 nm SAM Imaging for Chemical Mapping • True UHV Operation for Clean & Artefact-Free Surfaces

SEM image sequence showing the navigation on a large integrated circuit. Small copper pads are partially interconnected by randomly distributed carbon nanotubes (CNT's) and thus give direct access to the transport properties of a single CNT. Two STM probe tips are used to electrically contact the copper pads. I/V curves are taken with one tip while the second tip serves as a variable reference potential. Sample by courtesy of: C. Whelan, IMEC (Belgium). Omicron NanoTechnology GmbH www.omicron.de

mate Nanoprobing A major challenge in nanotechnology is the incorporation of single nanodevices into large integrated circuits. Device technology research thus requires local electrical characterisation in combination with a probe navigation that bridges dimensions from the mm scale down to the nm scale. The UHV NANOPROBE is a sophisticated analytical instrument specically designed for local and non-destructive 4-point contact measurements and function testing of nanodevices within complex structures and integrated circuits. Omicron's proven SPM technology is the key to advancing probing...

From NanoLAB to NanoFAB A specially designed UHV system and dedicated damping technologies are fundamental requirements for optimal performance of all measurement techniques. An extremely rigid frame carries the thickwalled main chamber and is vibration-isolated by a pneumatic auto-levelling damping system. In addition, the UHV NANOPROBE stage is efciently de-coupled by a VITON™ stack damping system ensuring both STM performance and a rigid mechanical loop to the high-resolution UHV Gemini column. Stand-alone 'UHV NANOPROBE S' system. scaled magnetic sensors under variable magnetic transfer...

Customised UHV NANOPROBE Solutions The standard conguration 'UHV NANOPROBE S' is a stand-alone single-chamber system equipped with a fast entry load lock and two storage carousels for probe tips and samples. The system concept is modular and the standard 'S' system can be extended or even upgraded later to a dual-chamber system 'UHV NANOPROBE XP'. This extension allows for separate sample preparation by sputtering, annealing, and thin lm deposition or integration of additional analysis techniques. Sophisticated analysis technologies are widely integrated with the complex production process...

4 Independent SPM's for Precise Probe Positioning The UHV NANOPROBE stage is mounted on an external XY manipulator. Schematic of the UHV NANOPROBE. The UHV Gemini column for SEM navigation is mounted on top of the UHV NANOPROBE stage. Coarse Positioning and Position Read-Out The UHV NANOPROBE stage carries four individual SPM probe modules with 3D coarse positioning and a sample stage with 2D coarse positioning, a system with overall 14 degrees of freedom. A reliable UHV coarse positioning technology is therefore fundamental for efcient operation. Omicron's patented remote-controlled...

For optimal SEM and SAM performance, an external XY manipulator allows precise alignment of the complete UHV NANOPROBE stage with respect to the SEM column and NanoSAM energy analyser. Positioning range ø 14 mm Probe exchange and transfer in UHV is extremely fast and reliable employing magnetically held tip carriers, wobble sticks and manipulators. Sample Stage The UHV NANOPROBE is compatible with Omicron's standard at sample plates with a maximum sample size of 10 mm x 10 mm. For the investigation of temperature-dependent behaviour of samples or devices, the UHV NANOPROBE allows sample...

STM Technology for Probe Approach and Imaging Each probe module uses a single-tube piezo for STM-based tip approach and is capable of atomicscale STM imaging. STM imaging is required for nal precise positioning of the probe tip when its apex shadows nanometer-sized structures in the SEM navigation or if the structures are even smaller than accessible by SEM. The available STM functionalities depend only on the electronics used and range from simple electronics for manual control to a fully equipped Omicron MATRIX SPM control unit. A dedicated pre-amplier technology enables pA STM current...

SEM and SAM SEM Imaging and Tip Navigation Source Chamber Thermal Field Emitter Anode Chamber Isolation Valve Electro-Magnetic Aperture Changer CF UHV Flange Photomultiplier Magnetic Lens In-lens SED Electrostatic Lens Scan Coils Schematic of the UHV Gemini column. Advancing the UHV Gemini column SEM resolution to below 4 nm in the UHV NANOPROBE has great impact on the capabilities of a nanoprobing system. It allows for the localisation of extremely small structures as well as rapid and precise positioning of probes by truly simultaneous SEM and STM operation. Even if the SEM beam current...

Results. And nothing but... Electrical and Electro-Optical Properties of Nanowires Transport Measurements on Platinum-Coated CNT´s Figure 1: Hooking up with platinum balls. guration eliminate substrate inuence current, capacitance, nanotubes coated port measurements two-terminal trans- ence potential and I/V curves shift with changing potential. Sample by courtesy of: L.Lau, University of Western Ontario, nanostick suspended by two probes. I/V curve of the suspended nanostick in two-probe conguration (red) and I/V curve (blue) Electrical Characterisation of MR Samples Probe position-...

Probing of Single CdTe Wires Left and middle: SEM images showing probe navigation on CdTe nanowires, standing upright and having a typical diameter of ≈ 250 nm. Right: I/V curve taken with electrical contact on top of the wire. Different wires show semiconducting as well as metallic transport behaviour. Sample by courtesy of: H. Atwater, CalTech, USA (*). Ultra-Small Au Island as Contact Pads for Nanodevices Left: SEM image showing Au islands on MoS2 with a typical size of only 10-40 nm. Middle: SEM navigation and positioning of two tips onto neighbouring islands. Inter-tip distance in the...