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SPHERA

Product catalog summary

Introduction
The document introduces the SPHERA and iSPHERA hemispherical analysers by Omicron NanoTechnology GmbH, designed for advanced surface analysis using X-ray Photoelectron Spectroscopy (XPS) and related techniques. These tools are aimed at providing uncompromised performance for quantitative analysis in various research fields.

Key Features

Advanced lens design for small area XPS and Scanning Auger Microscopy (SAM).
High count rates for rapid quantification and excellent sensitivity for XPS, Ion Scattering Spectroscopy (ISS), Auger Electron Spectroscopy (AES), and Ultraviolet Photoelectron Spectroscopy (UPS).
Integrated lens deflectors for imaging XPS and a CASCADE automation system for seamless operation.
Capability for rapid upgrades of outdated XPS systems.

Specifications and Performance

The SPHERA analyser includes a 180° hemispherical analyser with double focusing properties, ensuring high transmission and excellent signal-to-noise ratios.
It operates in Constant Analyser Energy (CAE) or Constant Retard Ratio (CRR) modes, with a high dynamic range 1D detector for superior quantitative analysis.
The lens geometry supports 'magic-angle' operation and allows for charge neutralisation sources to operate efficiently.

Imaging and Analysis Capabilities

Imaging XPS allows for rapid large area mapping and small spot analysis, enabling detailed chemical evaluation of areas as small as 60 µm.
The system supports Angle Resolved XPS (AR-XPS) for direct measurement of thickness and composition of ultra-thin films.
Integrated scan deflectors and aperture systems enhance imaging capabilities, allowing for detailed mapping without manipulator movement.

Control and Software

The SPHERA is controlled via the EAC 2000 controller and CASCADE software, providing an intuitive graphical user interface for comprehensive control over the analyser and associated components.
CASCADE supports automatic control of sequences such as depth-profiling and multi-point analysis, with data reduction possible in Multipak or CasaXPS.

Applications and Benefits

The SPHERA and iSPHERA analysers are suitable for materials science, device, polymer, catalyst, and thin film studies.
They offer rapid and reproducible XPS quantification, high energy resolution, and small spot spectroscopy.
The analysers are designed for long-term reliability with low running costs, making them ideal for high-throughput laboratories.

Conclusion
The SPHERA series provides a comprehensive solution for modern surface analysis challenges, offering advanced features and robust performance for a wide range of applications.

Specifications
The document mentions the use of 2 nm HfON and 1 nm SiON on a Si substrate. It references the SPHERA 401-V03/Sept.08 model, indicating that specifications and descriptions are subject to change without notice.

Contact Information
Omicron NanoTechnology GmbH is headquartered in Taunusstein, Germany. Contact details include phone, fax, and email, with additional information available on their website. They have a global presence with agents and partners worldwide.

Technical Data
The document provides data on XPS (X-ray Photoelectron Spectroscopy) measurements, specifically the intensity versus FWHM (Full Width at Half Maximum) for Ag 3d5/2 photoelectrons. Measurements are taken in high magnification mode using both Mg Kα and Al Kα sources.

Performance Metrics

For U7 (7-channel) with Mg Kα: Peak-width FWHM of 0.85 eV corresponds to a countrate of 3000 kcps, 1.00 eV to 9000 kcps, and 1.40 eV to 21000 kcps.
For U7 (7-channel) with Al Kα: Resolution FWHM of 0.60 eV corresponds to an intensity of 260 kcps.

Additional Notes
The document highlights the importance of a 90° angle between the analyser and x-ray source for accurate measurements.

Catalog excerpts

XPS without Compromise SPHERA • Advanced lens design for small area XPS and SAM • High count rates for rapid quantification • Excellent sensitivity for XPS, ISS, AES and UPS • Integrated lens deflectors for imaging XPS • CASCADE automation system • Rapid upgrade of outdated XPS systems SPHERA 401-V03/Sept.08

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Omicron NanoTechnology GmbH www.omicron.de 2 The Ultimate Tool for Schematic diagram of the SPHERA analyser showing the aperture selection tumbler. Lens aperture selection drive Imaging XPS overview of the whole sample (Quartz microbalance) Field of view (F.O.V): 15 x 15 mm / Resolution: No specification / Acquisition: 20 mins, Au map. Rapid imaging XPS map for Selectable Area XPS (SA-XPS) of points of interest 1-3 F.O.V: 5 x 5 mm / Resolution: < 100 ìm / Acquisition: 14 mins, Au map. Point 1 Point 2 Point 3 1 mm Widescan spectrum of contaminant region at point 1: Primary constituents: Ag + S...

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Omicron NanoTechnology GmbH www.omicron.de SPHERA and iSPHERA The latest generation of the range of SPHERA hemispherical analysers continues to help answer challenging surface analytical questions with novel, reliable features, regardless of system configuration. Whether an integral part of an Omicron ESCA solution, multi-function platform with SPM or thin film growth, or as an upgrade of an out of date XPS platform, the SPHERA-CASCADE package delivers uncompromising XPS performance in-line with the expectations of modern research. Both SPHERA and iSPHERA incorporate features which enhance user...

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Omicron NanoTechnology GmbH www.omicron.de 4 Lens Geometry The SPHERA transfer lens has been designed so that XPS performance is uncompromised, regardless of the final system geometry or system manufacture (whether supplied by Omicron, other commercial supplier or self built). The lens incorporates a 'thin-and-slim' profile to ensure 'magic-angle' operation (54°), without software transmission correction. It also allows charge neutralisation sources to operate close to parallel. The standard working distance of 30 mm and the stepped 30-45-50° conical shape of the nose provide optimum access to...

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Omicron NanoTechnology GmbH www.omicron.de 5 [1] M.P. Seah, I.S, Gilmore, S.J. Spencer, Applied Surface Science 144-145 (1999) PG 132-136 SPHERA Analyser SPHERA includes a 180° hemispherical analyser with double focussing properties for optimum focussing in both energy dispersive and non-dispersive directions. The analyser geometry has been calculated to provide high transmission for optimised count rates and excellent signal-tonoise ratios. The indexed multiple slit mechanism is simple to operate via external switching and allows selection of a range of energy resolutions vs transmission. The...

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Omicron NanoTechnology GmbH www.omicron.de 6 CASCADE Control Software SPHERA is controlled via Omicron’s proven EAC 2000 controller, offering both reliability and quality performance. The latest version of the EAC 2000, is fully integrated with the CASCADE experimental control system, providing the operator an intuitive graphical user interface. It provides all lens, analyser and detector voltages under the control of the experimental command protocol. The availability of a common control platform across the entire Omicron product range ensures the highest levels of development and support to...

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Omicron NanoTechnology GmbH www.omicron.de 7 O1s C1s N1s Ca2s P2p Cl2p P2s Ca2p 6000 4000 2000 0 c/s 700 500 300 100 0 Binding Energy (eV) Results Imaging The iSPHERA imaging facility allows the operator to rapidly identify regions of interest and then undertake analysis. Large area imaging is ideal for identifying analysis regions on powdered materials or contaminants on the surfaces of metals which cannot be identified optically. Quantitative Analysis The low angular acceptance (±2°) of the SPHERA analyser is key, to analyse the latest Ultra-Thin Film materials. The AR-XPS technique provides...

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SPHERA 401-V03/Sept.08 Printed by Druckerei und Verlag Klaus Koch GmbH Specifications and descriptions contained in this brochure are subject to alteration without notice. Omicron MBE-Variability SPHERA analyser Headquarters: Omicron NanoTechnology GmbH Limburger Str. 75 65232 Taunusstein Germany Tel. +49 (0) 61 28 / 987 - 0 Fax +49 (0) 61 28 / 987 - 185 Web: www.omicron.de or www.omicron-instruments.com e-mail: [email protected] We have agents and partners worldwide – please check our website to find your nearest contact. How to contact us Moscow XPS Intensity vs FWHM. Intensities and FWHM for...

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