MBE PRO 753-V01/Oct10 MBE Systems / PRO-75 & PRO-100 MBE System PR0-75 and PRO-100 MBE System: Standard System with Preparation/Storage Chamber and with Loadlock Chamber PRO-75 & PRO-100 chamber cross-section Example for a realized system PRO-75 & PRO-100 Design Main Features: • Suitable for 3“ (PRO-75) and 4“ substrates (PRO-100) • Ultimate chamber design for up to 12 effusion cells • Large effusion cell capacity from 60 cm3 up to 200 cm3 for layer growth • Smaller effusion cell volumes from 1.5 cm3 to 10 cm3 for doping applications • Rotary shutters for the effusion cells (optional linear shutter ports) • Source to substrate distance: 290 mm • Source angle tilt wrt. sample normal: 40° => < 1% thickness homogeneity for a 4“ substrate • In-Vacuum length for effusion cells: 287 mm for CF70 270 mm for CF114 250 mm for CF150 • User adjustable tradeoff between thickness uniformity and material consumption (crucible insert) www.omicron.de • LN2 cooling shroud • Large pumping port for high pumping speed and true UHV using Turbo-, TSP-, IGP- or Cryo-Pump • System design allows for different growth applications: - Metal MBE Growth - Semiconductor Growth - Magnetic Materials Growth - Oxide MBE Growth - Organic MBE • Reliable sample manipulator with different heating options: Ta-Wire, W-Wire, SiC or PG-Heater • Main shutter for the sample manipulator • Easy and intuitive to operate the growth control software • Reliable and fast sample transfer • Ultimate performance at low cost of ownership

Detailed Deposition Chamber Design: Sample Manipulator: Chamber diameter: 22“ O.D. (560 mm) Accepts standard Omicron 3“ or 4“ sample acceptors and smaller (using Chamber top flange: 24.4“ O.D. (620 mm) suitable adaptors) Chamber options: a) twelve ports for effusion cells (7 x 6“ flanges & 5 x 4.5“ flanges) one 4.5“ flange perpendicular to the sample for optical measurements Movement: z-direction (25 mm) for sample transfer b) nine ports for effusion (5 x 6“ flanges & 4 x 4.5“ flanges) & one azimuthal rotation (cont. n*360°) with up to 50 RPM e-beam evaporator ports (1 x 12“ O.D.) (optional electrically...