Scanning Auger with Ultimate Resolution NanoSAM Lab • 5 nm SAM Resolution • 3 nm SEM Resolution • Depth Profi ling and Charge Neutralisation • Additional Techniques: EBSD, SEMPA, FIB, EBL NanoSAM Lab 530-V01/Oct.06

Omicron NanoTechnology GmbH www.omicron.de 2 The NanoSAM Lab is the ultimate tool for the analysis of small structures. Driven by the unique performance of the UHV Gemini electron column it guarantees unrivalled resolution below 5 nm in Scanning Auger Microscopy (SAM) and better than 3 nm in SEM. In contrast to other Auger tools the extremely good resolution is not only available at standard 20kV beam energy, but even at 5 keV the SAM resolution remains below 10 nm. This allows operation in a parameter range where the Auger cross sections are high, and well documented for quantitative analysis....

Omicron NanoTechnology GmbH www.omicron.de 3 NanoSAM Lab with sample preparation chamber. UHV Gemini Column The patented UHV Gemini column is the highest resolution electron source available for UHV operation. Designed for true UHV <1x10-8 Pa, the column is fully bakeable to 180°C, and operates without any measurable outgassing: a must for contamination free research on many materials. The design of the UHV Gemini Column is the result of a collaboration between Omicron and ZEISS NTS, employing the same electron optics as used in the ZEISS Gemini SEM product range. Both the leading edge SEM software...

Omicron NanoTechnology GmbH www.omicron.de 4 Optional Techniques • Combined XPS and SAM for in situ analysis of the elemental composition and chemical functionality. • Electron BackScatter Diffraction (EBSD) for in situ analysis of the crystal structure alongside with the elemental composition. • Focussed Ion Beam (FIB) for tailoring of the sample structure (UHV-Crossbeam with < 10 nm spotsize). • SEM with Polarisation Analysis (SEMPA) for imaging of the magnetic domain structure. • Electron Beam Lithography (EBL) under cleanest conditions (UHV < 1*10-9 Pa) for basic research on new resists materials...

Omicron NanoTechnology GmbH www.omicron.de • UHV Gemini Electron Column: - highest spatial resolution - smallest e-beam spotsize - unique low energy performance - effi cient SEM with In-Lens SED • NanoSAM Electron Analyser: - variable energy resolution - excellent sensitivity, multichannel detection • Sample Handling: - fl exible sample size - variable sample temperature (50-500K) - sample tilt ±60° NanoSAM Lab at a glance: 30 nm 20 nm Compositional image showing the distribution of Silver (yellow), Oxygen (red), and Silicon (blue). SAM SEM dX = 4.6 nm Silver islands on Silicon, Ag MNN, 352 eV....

NanoSAM Lab 530-V01/Oct.06 Printed by Druckerei und Verlag Klaus Koch GmbH Specifi cations and descriptions contained in this brochure are subject to alteration without notice. Omicron MBE-Variability EUROPE UK: Omicron NanoTechnology Ltd. Tel. 01342 33 1000 • Email: [email protected] France: Omicron NanoTechnology • Tel. 0442 50 68 64 Email: [email protected] Italy: Omicron NanoTechnology GmbH, Roma Tel. 06 35 45 8553 • Email: [email protected] Sweden: Rowaco AB Tel. 013 138 010 • Email: [email protected] Spain: TECNOVAC, S.L. Tel. 091 804 1134 • Email: [email protected]...