IntroductionThe NanoESCA 500 is a cutting-edge instrument developed by Omicron NanoTechnology GmbH in collaboration with the University of Mainz, Saarland University, and Focus GmbH. It offers significant advancements in X-ray Photoelectron Spectroscopy (XPS) imaging and small spot spectroscopy, providing up to 10 times better resolution than existing technologies.
Specifications- Lateral resolution of 150 nm with synchrotron radiation and 650 nm with Al Kα.
- Survey images with less than 50 nm Photoelectron Emission
Microscope (PEEM) resolution.
- Features an aberration-corrected energy filter and a high-power monochromatic X-ray source.
Design and TechnologyThe NanoESCA employs a non-magnetic, electrostatic PEEM lens and a double-pass hemispherical analyzer. This design allows for rapid PEEM survey imaging and unique lateral resolution capabilities. The instrument's revolutionary design earned it the 2007 R&D 100 award.
Operating Modes-
PEEM Mode: Provides survey imaging with a large field of view and resolution down to 50 nm.
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Small Spot Spectroscopy Mode: Offers high sensitivity single-spot spectroscopy for quantitative elemental analysis.
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Imaging ESCA Mode: Projects magnified images into the analyzer for energy-filtered imaging.
ApplicationsThe NanoESCA is suitable for both laboratory and synchrotron use. It can achieve 150 nm lateral and 200 meV energy resolution with synchrotron radiation. It is also capable of imaging magnetic domains and extracting chemical information using polarized light sources.
Laboratory ApplicationsIncludes bonding state imaging and high kinetic energy imaging. The instrument can extract spectra from image stacks, providing detailed chemical maps and elemental analysis.
ConclusionThe NanoESCA 500 represents a significant advancement in nanotechnology instrumentation, offering unparalleled resolution and versatility for XPS imaging and spectroscopy.