MULTIPROBE A Family of Multi-Technique UHV Surface Science Systems • Standard, Turn-Key UHV Systems • Characterisation, Analysis & Deposition Techniques From a Single Supplier • Customised Solutions Tailored to Requirements • Outstanding Quality & Excellent Durability • Rigid Designs for Maximum Stability in SPM, SEM, SAM & PEEM

The SPM-PROBE (1) consists of a main SPM chamber equipped with extra flanges for auxiliary techniques, thus forming a very compact, stand-alone UHV SPM workstation. The Standard MULTIPROBE system variants S (2), P, XP and RM demonstrate Omicrons successful concept of combining atomic resolution UHV SPM with a comprehensive range of complementary multi-technique surface analysis and sample preparation techniques. MULTIPROBE Compact Multi-Technique The modular and compact design of the MULTIPROBE systems has proven itself more than 1000-times and forms the core module for multi-technique Ultra-High-Vacuum...

Sample Holder View inside a MULTIPROBE system showing multi-technique capabilities and chamber flexibility. Electron Spectroscopy Chamber Scanning Probe Microscopy Chamber MULTIPROBE System Features Bench & Chambers Sample Heating / Cooling A combination of a rigid bench construction and optional air damping legs allow ultimate SEM/SAM or SPM resolution in a range of operating environments. All chambers are made of either non-magnetic stainless steel or Mu-metal for efficient magnetic shielding. The analysis chambers provide additional ports for future upgrades of the system with additional techniques....

MULTIPROBE Chamber Modularity Analyser Depth Profiling/ISS Analysis The analysis chamber houses various spectroscopy techniques, including XPS, ISS, UPS, AES/ SAM, SEM, etc. Alternative analysis chambers for dedicated applications such as Mono-XPS, ARUPS, HREELS and Low Temperature SPM are also available. The Scanning Probe Microscope (SPM) is housed in its own dedicated chamber, bolted directly onto the analysis chamber. This enables easy access and simultaneous operation of other analysis techniques. The chamber has suitable viewports for ideal observation of the tip/sample coarse approach...

ROBE Systems Sputtering Manipulator Load Lock Sample Transfer A selection of standard preparation chambers provide in-situ preparation facilities. These range from standard sample preparation techniques and thin film growth, sputtering and annealing, offered by the compact MULTIPROBE P Chamber to advanced in-situ characterisation using LEED or RHEED and analysis options available with the XP and RM versions. The MULTIPROBE RM has a research MBE chamber that allows for up to five evaporation sources on a cluster flange, a RHEED system and a LN2 cooling shroud. Custom designs are also possible,...

An easy-to-use pincer-grip wobble stick is used for fast transfer between the main system manipulator, the sample/tip storage carousel and the sample stage of the SPM. Wobble stick Sample plate in rotated manipulator - ready for pick up with wobble stick. Sample plate in transfer rod. Bolt-on chamber Sample plate in transfer rod. Optical Access Sample plate in rotated manipulator - ready for pick up with wobble stick. Easy & Safe Sample Transfer The VT STM can optionally be equipped with a long focal length optical microscop Optical Access for sensor navigation (shown above on a The VT STM can...

The MULTIPROBE Compact PEEM (3) is a surface analysis UHV system designed for high resolution PEEM work in combination with LEED and SPM. It also offers sample sputtering, heating, or thin film evaporation. MULTIPR The MULTIPROBE MXPS (4) offers an alternative analysis module compatible with an x-ray monochromator. It fits exactly into the modularity of the MULTIPROBE concept and is available in the same P, XP, and RM variants. MULTIPROBE Compact PEEM Philosophy MULTIPROBE at a glance: • Modular and compact design • More than 30 different experimental techniques • SPM, SEM, SAM, electron spectroscopy...

Headquarters: Omicron NanoTechnology GmbH Limburger Str. 75 65232 Taunusstein, Germany Tel. +49 (0) 61 28 / 987 - 0 Fax +49 (0) 61 28 / 987 - 185 Web: www.omicron.de e-mail: [email protected] East Grinstead Linköping Moscow Poznan Bucharest We have agents and partners worldwide – please check our website to find your nearest contact. Seoul Tokyo Taipei Mumbai Omicron NanoTechnology is part of the Oxford Instruments Group. For more information: www.oxford-instruments.com or just send us an e-mail: [email protected] Rome Ankara Sales Sales & Service Headquarters The MULTIPROBE Family SPM...