The MS 5 Micro Piezo Slide Two MS 5 units combined for independent 2D lateral positioning in Y and Y directions. The MS 5 is based on the principle of inertia drives employed in Omicronђs Scanning Probe Microscopes. It provides a highly compact and effective means of achieving accurate positioning without the necessity for complex and sensitive mechanical couplings. The MS 5 only requires electrical connections and thus minimises thermal and vibration isolation problems while allowing for user-friendly remote control of the device even under difficult bound- ary conditions. The MS 5 can also be used under ambient conditions in fields such as precision optics, micro-engineering, micro-structuring, nanolithography and other applications where a precise, backlash-free positioning of samples, detectors, apertures, shutters, lenses, scanners and other devices is essential.The MS 5 piezo-electrically driven linear stepper motor incorporates specially designed guides and a pre-loaded construction to ensure guaranteed backlash-free movement with optimum repeat- ability. The MS 5 Micro Piezo Slide is fully UHV compatible and bakeable to 180C. The step size can be continuously varied between 40 nm and 400 nm, with a maximum travel of 5 mm. The load bearing capacity in the horizontal position is 300 g. The lifting capacity in the verti- cal orientation is approximately 50 g (tractive force 0.5 N). Extensive laser interferometer tests demonstrated a high repositioning accuracy with a lateral run-out of better than б20 nm. The MS 5 can be operated in any orientation. Up to three Micro Piezo Slide units can be easily com- bined to provide precise control of independent movement in three dimen- sions as an x/y/z-axis positioning device. Locating pins are utilised to ensure precise orthogonal alignment of the units. The versatile MSCU control unit allows for easy and precise operation of up to three individual MS 5 units, using a remote con- trol handset. Automatic control by means of a computer or an external signal gener- ated by TTL logic modules is also possible. The speed of movement of the Micro Piezo Slide can be control- led over a wide range, from a single 40 nm step to continu- ous movement operation driven at frequencies of 4, 3, 2, 1 or 0.5 kHz. The unit can be equipped with a UHV feedthrough and UHV compatible wiring. > Mounting three individual MS 5 Micro Piezo Slides to a 3D positioning unit. Electrical connections to the Micro Piezo Slide consist of one connection per axis plus an additional terminal for the ground wire. > MS 5 Micro Piezo Slide with 0.5 m long UHV-compatible wires MS CU Control unit for three axes with hand -held remote control (5 m cable) MS IX X/Y-table mounting kit MS BZ Z-axis mounting kit MS SC Atmospheric side cable with feedthrough > Omicron NanoTechnology GmbHwww.omicron.de size="-1">

Differential and integral lateral run-out of a MS 5 Micro Piezo Slide. Dimensions of a MS 5 Micro Piezo Slide. Connection of up to three MS 5 units with MSCU control unit and PC. > 1015 36101010 7 Dimensions in mm LogicPower SupplyRelays Step TimerClock Pulse X-axisY-axisZ-axisMS 5 units > Z+ Z - Remote Control Your local partner: > Headquarters: Omicron NanoTechnology GmbHLimburger Str. 75 ѕ D-65232 Taunusstein Germany Tel. +49 (0) 61 28 / 987 - 0 Օ Fax +49 (0) 61 28 /0 987 - 185 www.omicron-instruments.com or www.omicron.de > Specifications and descriptions contained in this brochure are subject...