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MBE Solutions Modular MBE Systems Series

MBE Solutions Modular MBE Systems Series
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MBE Solutions Modular MBE Systems Series - 1

MBE Solutions Modular MBE Systems LAB-10 & EVO-25/-50 & PRO-75/100 • Growth System Solutions for all Fields of Application • Excellent Sample Thickness & Doping Homogenity • Layer Growth with Outstanding Performance • Low Background Doping Level • Excellent Carrier Density & Mobility • Very Low Defect Density

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MBE Solutions Modular MBE Systems Series - 2

Photo supported by: Leibniz-Institut für Festkörperund Werkstoffforschung Dresden (IFW)

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MBE Solutions Modular MBE Systems Series - 3

n a SINGLE System For more than 10 years Omicron has continuously focussed on the increasing demands of the highest-purity and highest quality epitaxial layer growth. This is now reflected in the next generation MBE series the LAB-, EVO-, and PRO-MBE Series. The new and innovative MBE systems allows for epitaxial layer growth of highest quality. Various system layouts are dedicated to suit the researcher’s demands, such as III-V, III-N, II-VI, metal oxide or pure metal layer growth. The new MBE-series of systems fulfil the most stringent requirements of modern nanotechnology research....

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MBE Solutions Modular MBE Systems Series - 4

Features of the Standard MBE System Family Growth applications Substrate size Number of effusion cells and size Pumping system • Metal MBE growth • Semiconductor growth • Magnetic materials growth • Oxide MBE growth • Organic MBE Omicron standard sample plates Up to 7 effusion cells with cell capacity from 10 cm3 up to 35 cm3 for layer growth Large pumping port for high pumping speed and true UHV using Turbo-, TSP- and IGPpumps (smaller effusion cell volumes from 1.5 cm3 to 5 cm3 for doping applications) • Metal MBE growth • Semiconductor growth • Magnetic materials growth • Oxide MBE...

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MBE Solutions Modular MBE Systems Series - 5

Source to substrate orientation In-Vacuum length for effusion cells Sample manipulator options Further details* • Source angle tilt with respect to sample normal: 18° Cooling, heating, e-beam heating, ultra high temperature • Easy & intuitive to operate growth control software • Fast & reliable sample transfer • Excellent performance • Low cost of ownership • Rotary shutters for effusion cells High temperature sample heating with Ta-Wire, W-Wire, SiC or PG-Heater • Easy & intuitive to operate growth control software • Fast & reliable sample transfer • Excellent performance • Low cost of...

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MBE Solutions Modular MBE Systems Series - 6

Just a few MBE Systems... PRO-75 MBE System PRO-75 Metal Oxide system for 3 inch substrates with a high temperature oxygen resistant SiC heater. The system is equipped with a number of effusion cells and it is designed to accept e-beam evaporators with flux feedback regulation. RHEED for in-situ growth control is also possible. The system is controlled using the EPI-Soft process control software. State-of-the-Art PRO-75 III-N MBE system for 3 inch sized substrates with an additional insitu VT SPM directly attached. The system is equipped with various effusion cells and doping sources for...

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MBE Solutions Modular MBE Systems Series - 7

PRO-100 III-V MBE system for high-end quality film growth on 4 inch wafers. The system is equipped with effusion cells for Gallium, Indium, Aluminium, a valved Arsenic cracker source, doping sources, RHEED, beam flux monitor and EPISoft process control software. EVO-25 III-N MBE system for 1 inch sized substrates equipped with effusion cells for Gallium, Indium, Aluminium, Atomic Nitrogen using a RF-Plasma cracker source, a valved Arsenic cracker source, doping sources, RHEED and EPI-Soft process control software. PRO-100 MBE (4”) PVD, ALD, Sputtering & Analysis System Combined SiGe-MBE,...

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MBE Solutions Modular MBE Systems Series - 8

Headquarters: Omicron NanoTechnology GmbH Limburger Str. 75 65232 Taunusstein, Germany Tel. +49 (0) 61 28 / 987 - 0 Fax +49 (0) 61 28 / 987 - 185 Web: www.omicron.de e-mail: info@omicron.de East Grinstead Linköping Moscow Poznan Beijing We have agents and partners worldwide – please check our website to find your nearest contact. Taipei Mumbai Omicron NanoTechnology is part of the Oxford Instruments Group. For more information: www.oxford-instruments.com or just send us an e-mail: info.plc@oxinst.com Rome Bucharest Sales Sales & Service Headquarters MBE and Analysis in a Single System...

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