MBE PRO 753-V01/Oct10 MBE Systems / LAB-10 MBE System LAB-10 MBE System: Standard System with Preparation/Storage Chamber and with Loadlock Chamber LAB-10 chamber cross-section Example for a realized system LAB-10 Design Main Features: • Accepts all types of Omicron standard small samples • Proofen chamber design for up to 7 effusion cells • Effusion cell capacity from 10 cm3 up to 35 cm3 • Rotary shutters for the effusion cells • Source to substrate distance: 160 mm • Source angle tilt wrt. sample normal: 18° => < 1% thickness homogeneity for a 10 mm substrate • In-Vacuum length for effusion cells: 287 mm for CF70 270 mm for CF114 • Large pumping port for high pumping speed and true UHV using Turbo-, TSP- and IGP-Pump www.omicron.de • System design allows different growth applications: - Metal MBE Growth - Semiconductor Growth - Magnetic Materials Growth - Oxide MBE Growth - Organic MBE • Reliable sample manipulator with different options (cooling, heating, e-beam heating, ultra high temperature) • Main shutter for the sample manipulator • Easy and intuitive to operate the growth control software • Reliable and fast sample transfer • Excellent performance at low cost of ownership

Detailed Deposition Chamber Design: Sample Manipulator: Standard chamber diameter: 10“ O.D. (254 mm) Accepts standard Omicron small samples up to 10 x 10 mm Larger chamber diameter: 12“ O.D. (305 mm) - on request Movement: x/y-direction (± 8 mm) Standard chamber top flange: 12“ O.D. (305 mm) z-direction (100 mm) Larger chamber top flange: 14.25“ O.D. (362 mm) - on request azimuthal rotation (±180°) Cluster flange options: a) seven ports for effusion cells (7 x 2.75“ O.D.) With substrate shutter (optional electrically driven and remote controlled one 2.75“ flange perpendicular to the sample for...