MBE PRO 753-V01/Oct10 MBE Systems / EVO-25 & EVO-50 MBE System EV0-25 and EVO-50 MBE System: Standard System with Preparation/Storage Chamber and with Loadlock Chamber EVO-25 & EVO-50 chmaber cross-section Example for a realized system EVO-25 & EVO-50 Design Main Features: • Suitable for 1“ (EVO-25) and 2“ substrates (EVO-50) • Ultimate chamber design for up to 10 effusion cells • Large effusion cell capacity from 35 cm3 up to 80 cm3 for layer growth • Smaller effusion cell volumes from 1.5 cm3 to 5 cm3 for doping applications • Rotary shutters for the effusion cells (optional linear shutter ports) • Source to substrate distance: 190 mm • Source angle tilt wrt. sample normal: 38° => < 1% thickness homogeneity for a 2“ substrate • In-Vacuum length for effusion cells: 287 mm for CF70 270 mm for CF114 250 mm for CF150 www.omicron.de • LN2 cooling shroud • Large pumping port for high pumping speed and true UHV using Turbo-, TSP-, IGP- or Cryo-Pump • System design allows different growth applications: - Metal MBE Growth - Semiconductor Growth - Magnetic Materials Growth - Oxide MBE Growth - Organic MBE • Reliable sample manipulator with different heating options: Ta-Wire, W-Wire, SiC or PG-Heater • Main shutter for the sample manipulator • Easy and intuitive to operate the growth control software • Reliable and fast sample transfer • Excellent performance at low cost of ownership

Detailed Deposition Chamber Design: Sample Manipulator: Chamber diameter: 16“ O.D. (406 mm) Accepts standard Omicron 1“ or 2“ sample acceptors and smaller (using Chamber top flange: 18.7“ O.D. (475 mm) suitable adaptors) Chamber options: a) ten ports for effusion cells (10 x 4.5“ flange) one 2.75“ flange perpendicular to the sample for optical Movement: z-direction (25 mm) for sample transfer measurements azimuthal rotation (cont. n*360°) with up to 50 RPM b) eight ports for effusion cells (8 x 4.5“ flange) and one (optional electrically driven and remote controlled via software) c) six ports...