MBE PRO 753-V01/Oct10 EKF 300 0.1 to 5 KeV (Multi-function) Electron Source With a high beam current, greater than 15 μA, the EKF 300 includes an integral X-Y deflector, with a scan range of more than ± 6 mm. The NGE 52 intuitively displays all the source operating voltages and currents and provides an interface for the remote control of beam energy and beam blanking. The EKF 300 is connected to the NGE 52 through a 12-pin feedthrough in a CF 38 flange and a single cable for all operating and scanning voltages. The wide range of operating characteristics of the EKF 300 are simply set by the grid voltages on the control unit. Two grid voltage ranges, 0 to +60 V (positive) and 0 to –200 V (negative), can be selected by jumpers in the NGE 52. Producing a full range of operation, with maximum flexibility. AES survey spectrum EKF 300, AES on Ag Sample of Ag. 1x106 9x105 Intensity [CPS] 8x105 7x105 6x105 5x105 4x105 3x105 200 400 600 800 1000 1200 1400 Kinetic Energy [eV] 1600 1800 AES narrow scan EKF 300, 5 kV, 10 nA, Ag Auger, CRR 4 spectrum on Ag at high signal for rapid 3.0x106 chemical characterisation. 2.5x106 Intensity [CPS] The EKF 300 Electron Source with the NGE 52 Electron Source Power Supply is a highly versatile 0.1 to 5 keV electron source designed for both static Auger measurements and for use as an electron flood source. The spot size can be adjusted down to 300 μm within an energy range from 1 keV to 5 keV at the standard working distance of 66 mm. 2.0x106 1.5x106 1.0x106 200 250 300 Kinetic Energy [eV] 350 400 The positive range allows the source to operate in a broad spot mode at higher beam currents and low beam energy suitable for some charge neutralisation applications. The negative range allows the source to operate in a small spot mode suitable for AES. EKF 300 electron source for a wide range of AES applications. www.omicron.de

Technical Information: EKF 300 Electron Source Minimum spot size, small spot mode (at 66 mm working distance): 300 μm (at 100 nA beam current, energy range from 1 keV to 5 keV) Maximum spot size, broad spot mode (at 66 mm working distance): 10 mm Beam energy: 100 eV to 5 keV Grid voltage range, small spot mode: 0 to –200 V The focus control on the NGE 52 can be used to defocus the beam in either mode. This allows the Grid voltage range, broad spot mode: 0 to +60 V charge neutralisation area to be increased in broad spot mode and when required the small spot mode can be used for charge neutralisation...