Fused Silica
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DUV/UV, VIS and IR applications LITHOSIL® Synthetic Fused Silica

2 LITHOSIL® Synthetic Fused Silica LITHOSIL® is available in four different inner quality grades as well as in a “standardgrade- opto” version. Key quality features of the different grades are: ¡ inclusion / bubble free (eg. grades Q0 + Q1) ¡ excellent UV transmittance ¡ very low fluorescence ¡ high laser durability ¡ low stress birefringence ¡ high refractive index homogeneity: additional 3D option ¡ very low thermal expansion coefficient ¡ high temperature stability The high laser durability of fused silica makes it the first choice material for inclusion free material according to the...

• All grades show an internal transmittance 99.9 % in the wavelength range of 300…900 nm. • All grades show a hydrogen content of appr. 1 *1018 Mol. / cm3 H2 4 Spectral Transmission wavelength [nm] 750 1250 1750 2250 2750 3250 3750 0 20 40 60 80 100 transmission/internal transmission [%] 150 170 190 210 230 250 Transmission including Fresnel reflection losses/internal Transmission without Fresnel reflection Measurements performed at IPHT Jena fluorescence signal [arbitrary units] Example of LIF-Spectrum wavelength [nm] 350 400 450 500 550 600 650 700 750 Lithosil¤Q Lithosil¤Q-E average 0 5...

Model for radiation induced defect generation Radiation induced effects for long term irradiation are very well described by a model for 248 nm and 193 nm. Absorption, Hydrogen consumption, Compaction, Rarefaction ¡ radiation induced absorption saturation ¡ radiation induced hydrogen consumption saturation ¡ preponderance of compaction or rarefaction strongly depends on energy density, pulse length and pulse number. Literature link: 1, 2 A radiation induced effect on short term basis is the rapid damage RDP which describes the dependence of transmission on to the variation of energy...

6 Properties of LITHOSIL® nd = 1.45843 vd = 67.83 nF – nC = 0.00676 ne = 1.46004 ve = 67.68 nF’ – nC’ = 0.00680 For further technical information please see Lit: 8, 9, 10, 11! Refractive Index Variation over Temperature Change Än/ÄT (18 – 28 °C) = t0 + t1 · ë-2 + t2 · ë-4 + t3 · ë-6

1 1.0 1.0 1.0 0 Chemical Behavior of Polished Surfaces Climatic Resistance Class (ISO/WD 13384) CR Acid Resistance Class (ISO 8424) SR Alkali Resistance Class (ISO 10629) AR Phosphate Resistance Class (ISO 9689) PR Stain Resistance Class FR Abbe Diagram LASF PSK FK LLF PK K SSK BAF KF SF LAK 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.80 1.85 1.90 1.95 2.00 nd 90 85 80 75 70 65 60 55 50 45 40 35 30 25 20 íd BAK 90 85 80 75 70 65 60 55 50 45 40 35 30 25 20 íd BASF LAF F BALF LF BK SK 1.45 1.50 1.55 1.60 1.65 1.70 1.75 1.80 1.85 1.90 1.95 2.00 nd CaF2 SiO2 The following downloads are available at:...

1. U. Natura, O. Sohr, R. Martin, M. Kahlke, G. Fasold: “Mechanisms of radiation induced defect generation in fused silica”, Proceedings of SPIE Volume 5273, 155-163, Boulder, 2003 2. U. Natura, O. Sohr, M. Letz, R. Martin, M. Kahlke, G. Fasold: “Excimer laser induced defect generation in Lithosil”, Proceedings of SPIE Volume 5377, 1708-1714, 2004 3. C. Mühlig, S. Kufert, W. Triebel, F. Coriand: “Simultaneous measurement of bulk absorption and fluorescence in fused silica upon ArF laser irradiation”, Proceedings of SPIE Volume 5779, 107-116, Seattle, 2002 4. U Natura, R. Martin, G. Goenna,...

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