APCVD System Low cost in-line deposition of thin films The 5500 Series APCVD System is well suited for continuous low cost high volume processing of substrates requiring single as well as multi-layer thin films. SCHMID’s in-line system design assures that each substrate receives the same process treatment. The energy efficient precision film deposition provides unequaled economical performance.

Expect Solutions Details The production proven APCVD System from SCHMID includes multiple injector heads in series to maximize process throughput, uniformity, and flexibility while minimizing cost. The world class HMI allows the customer to easily monitor and control all process parameters in a user-friendly touchscreen environment. The maintenance-conscious design allows chemical injectors and exhaust ducting to be cleaned while in place on the system and without significant process interruption. Modular chemical vapor injector head assemblies allow quick and easy installation and removal from...