high speed scanning in pocket size The exceptionally compact scan heads of the new SCANcube®  III series establish industry standards for accuracy and dynamic performance. • Far higher scan speeds (up to 100%) • Significantly improved dynamic performance (up to 50%) • Much lower long-term drift (- 50%) • Substantially reduced temperature drift (more than 40%) • Clearly lower heat generation (approx. 50%) SCANcube®  III scan heads take advantage of the new dynAXIS ® 3 series galvanometer scanners for the first time. In conjunction with new electronics, these galvos deliver highest dynamic performance, lowest drift and best linearity. The SCANcube®  III series of scan heads continue to feature a robust, sealed housing for protection against water and dust. And the housing‘s extremely compact dimensions facilitate easy integration into your production lines. Full mechanical and electronic compatibility with previous SCANcube® series is retained, thus    simplifying upgrades. Typical Applications: • • • • Marking applications Materials processing in the semiconductor industry Microstructuring Processing-on-the-fly

The high quality of SCANLAB’s scan solutions is the result of years of experience in the development and manufacture of galvanometer scanners and scan systems. In addition, every scan system must first pass the SCAN  heck burn-in test before it c is released for shipment to the customer. Aperture Tracking error Step response time (1) 1% of full scale Marking speed Positioning speed Good writing quality High writing quality • varioSCAN: upgrade to a 3-axis scan system • Camera adapter for optical process monitoring Writing speed Long-term drift (8-h-drift after 30 min warm-up) (3) Temperature...