the premium scanning standard excelliSCAN scan heads set new standards for the most With its high-end design, the excelliSCAN achieves an demanding laser scanning requirements. These high performance unprecedented level of performance in terms of dynamics and 2D scan systems offer highly dynamic and accurate positioning precision, resulting in a significant increase in productivity and of the laser beam in the working plane. process accuracy. Key features Typical applications • Innovative housing concept with improved thermal • Micromachining im^g^nt improved (IP66) and robustness • Additive manufacturing (3D printing) • SCANahead control: full utilization of scanner dynamics for • |_aser cutting higher throughput and precision • Ready for SCANmotionControl

Advantages SCANahead Control excelliSCAN systems are equipped with SCANahead control, which offers the following advantages: • Full utilization of galvo dynamics for increased throughput • No tracking error, even at high speeds • Fast marking of circles without necking effects dynAXISse Galvanometer Scanner The excelliSCAN is based on the latest generation galvanometer scanner technology, enabling excellent contour fidelity even for demanding scan jobs: • Digital galvanometer scanners with 20-bit encoder technology for highest positioning accuracy and long-term stability • Best linearity and...

SCANahead Principle of operation With SCANahead control, the excelliSCAN always reaches the set scan speed using the maximum acceleration of the galvos (i.e. in the minimum acceleration time ta). In contrast to scanners using conventional tracking error ts based control algorithms, which have a constant acceleration time regardless of the target speed, the excelliSCAN requires suitably generated control values. Conventional control SCANahead control The RTC6 with SCANahead functionality, generates control values for the excelliSCAN with automatically determined delays. Limiting the acceleration...

SCANahead Control Compared to Conventional Control Conventional Control Dynamics SCANahead Control • Acceleration time ta is constant • Scanner axis acceleration always at maximum • Dynamic potential of the galvanometer scanner not used efficiently at all times • Fully utilized galvo dynamics • No tracking error ts = 0 • Precise image field correction even at high speeds • Typically optimized for a single application • Only one tuning needed. Optimum performance across all applications • Several different tunings necessary, only possible in digital scan systems. Use of delays • Finite, constant...

Technical Drawings General layout (example excelliSCAN 30) Connections for cooling water Interlock connection* Connection for mirror air cooling Alternative connector position Beam entrance Beam exit

Dynamics excelliSCAN 14 excelliSCAN 20 excelliSCAN 30 Aperture [mm] 14 20 30 Tuning universal universal universal Typical speeds (1) Positioning, jump & shoot [m/s] Line scan / raster scan [m/s] Typical vector marking [m/s] Good writing quality [cps] High writing quality [cps] Positioning times (1) 1 mm jump width [ms] 0.28 0.40 0.44 (1) with F-Theta objective, f = 160 mm (2) this corresponds to an angular acceleration of 3.2-105 rad/s2 (3) this corresponds to an angular acceleration of 1.6-105 rad/s2 (4) this corresponds to an angular acceleration of 1.3-105 rad/s2 Further Specifications Optical...