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intelliscanse
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smart scanning meets precision Thanks to digital encoder technology, intelli5G4Nse scan heads deliver unparalleled positioning accuracy, along with highest dynamic performance. Featuring lowest drift and dither values, they set new standards for the ultra-precise scanning typically demanded by high-end applications. The perfect working scenario for these scan heads: applications involving precision positioning stages with challenging throughput, productivity and accuracy requirements. SCANLAB's self-developed dynAX75se galvanometer scanners help the intelli5GANse attain a combination of superior precision and dynamics. Here, SCANLAB's patented digital encoder technology is implemented with stationary scales and extremely low inertia. This ensures highest processing accuracy, even under fluctuating ambient and processing conditions, and makes intelli5GANse 10 the market's fastest available high-precision 10-mm scan head - with an outstanding price/performance ratio. The intelli5GANse series of scan heads excels with industry-proven digital servo electronics, whose powerful algorithms enable top dynamics and processing quality. The electronics can be equipped and enhanced with several servo algorithms and parameter sets (tunings). Furthermore, the electronics offers comprehensive possibilities for tracking status values, diagnostics and communication between scan heads and control computers. All the scan system's key status values are collected (e.g. positions, mirror speeds, output stage currents, supply voltage and temperature). These values can be used for process simulation, monitoring and documentation, as well as process optimization in safety-critical applications. Typical Applications: • Microprocessing • Microstructuring • Materials processing • Processing-on-the-fly Typical Industries: • Display and electronics manufacturing • Semiconductor and photovoltaic industries • Automotive industry A SCANLAB /^h4& //?s>ovdto/s /br/tic/ustO'

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Specifications intelliSCAW e 10 intelliSCW 14 Tuning Fast Vector Sharp Edge Typical speeds (1) Marking speed Positioning speed Writing speed Good writing quality High writing quality Step response time (2) 1% of full scale 0.40 ms 0.45 ms Long-term drift 8-h-drift (after 30 min warm-up) (3) Offset Gain 24-h-drift (after 3 h warm-up) (3) Offset Gain Temperature drift Offset < 15 prad/K < 15 prad/K Gain < 8 ppm/K < 8 ppm/K Dither (position noise, RMS) < 2.0 prad < 1.6 prad (all angles are in optical degrees) (1) with F-Theta objective, f = 160 mm (2) settling...

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