smart scanning meets low drift The new intelliSCAN  III series of scan heads establishes industry standards for long-term stability and dynamic performance. • Much lower long-term drift (- 50%) • Significantly reduced temperature drift • Multitude of switchable tunings for shorter process times • Application-specific and customer-specific tunings • Realtime acquisition of all key operational states • Comprehensive diagnostic possibilities intelliSCAN  III scan heads take advantage of the new dynAXIS 3 series galvanometer scanners for the first time. In conjunction with new electronics, these galvos deliver highest dynamic performance, lowest drift and best linearity. intelliSCAN  III scan heads continue to offer all advantages of the intelliSCAN product line, including a wide assortment of options. Efficient algorithms of the digital servo electronics enable very high dynamic performance and marking quality. And the scan head electronics provide extensive possibilities for diagnostics and communication between the scan system and your control computer, as well as acquisition of all the scan system‘s key operational states. Typical Applications: • • • • • Micromachining Marking, welding, drilling Rapid prototyping, rapid tooling Materials processing in the semic

intelliSGAW III 10 intelliSGAW III 14 intelliSGAW III 20 intelliSGAW III 30 (4) Tuning Fast Vector Sharp Edge Fast Vector III (5) Fast Vector III (5) Step response time (1) 1% of full scale 0.40 ms 0.40 ms 0.65 ms 1.0 ms Typical speeds (2) Marking speed Positioning speed Writing speed Good writing quality High writing quality Long-term drift 8-h-drift (after 30 min warm-up) (3) Offset < 100 prad Temperature drift Offset < 15 prad/K < 15 prad/K < 20 prad/K < 20 prad/K Gain < 25 ppm/K < 25 ppm/K < 15 ppm/K < 15 ppm/K Weight ca. 3 kg ca....