smart scanning meets low drift The new intelliSCAN ®  III series of scan heads establishes industry standards for long-term stability and dynamic performance. • Much lower long-term drift (- 50%) • Significantly reduced temperature drift • Multitude of switchable tunings for shorter process times • Application-specific and customer-specific tunings • Realtime acquisition of all key operational states • Comprehensive diagnostic possibilities intelliSCAN ®  III scan heads take advantage of the new dynAXIS ® 3 series galvanometer scanners for the first time. In conjunction with new electronics, these galvos deliver highest dynamic performance, lowest drift and best linearity. intelliSCAN ®  III scan heads continue to offer all advantages of the intelliSCAN ® product line, including a wide assortment of options. Efficient algorithms of the digital servo electronics enable very high dynamic performance and marking quality. And the scan head electronics provide extensive possibilities for diagnostics and communication between the scan system and your control computer, as well as acquisition of all the scan system‘s key operational states. Typical Applications: • • • • • Micromachining Marking, welding, drilling Rapid prototyping, rapid tooling Materials processing in the semiconductor industry Processing-on-the-fly

Aperture Tracking error Marking speed Positioning speed Good writing quality High writing quality Step response time (2) 1% of full scale • varioSCAN: upgrade to a 3-axis scan system • High-performance variants with lightweight mirrors • Water and air cooling • Available as a scan module without housing Writing speed • Additional reference sensor system (ASC) for automatic self-calibration Long-term drift • Camera adapter for optical process monitoring Common Specifications Repeatability (RMS) Temperature drift Optical performance Typical scan angle Gain error Zero offset Power requirements SL2-100...