excelliSCAN 30: high contour fidelity, productivity, and process safety

Highest Precision Outstanding contour fidelity, highest positioning accuracy and long-term stability. Maximum Productivity Minimal acceleration and turnaround times significantly reduce process times. Optimal Process Safety Interlock and optionally integrated temperature sensors for monitoring the mirrors and the scan system.

Special Features of the excelliSCAN Series • SCANahead control • Optimized mechanics and cooling concept • Galvanometer scanner with 20-bit encoder technology • Easy integration and commissioning / \ SCANahead Control • Fully utilized galvo dynamics for increased throughput • No tracking error • Fast marking of circles without necking effects • Auto-delay function of the RTC6: laser and scanner delays are set automatically More information about SCANahead in video form: VJ Temperature Drift Offset [prad/K] < 15 Long-Term Drift Over 24 hours (after 3 h warm-up) (2) Offset [prad] < 20 Maximum speed...

Technical Drawings Beam entrance Connections for cooling water Interlock connection Connection for mirror air cooling Alternative connector position Beam exit SCANLAB GmbH · Siemensstr. 2a · 82178 Puchheim · Germany Tel. +49 89 800 746-0 · Fax +49 89 800 746-199 [email protected] · www.scanlab.de SCANLAB America, Inc. · 100 Illinois St · St. Charles, IL 60174 · USA Tel. +1 630 797-2044 · Fax +1 630 797-2001 [email protected] · www.scanlab-america.com 05/ 2023 Information is subject to change without notice. Product photos are non-binding and may show customized features. Beam entrance