Furon® RDVM and SMDVM 1" Self-Manifolding Distribution Valve Pneumatic or Manual Actuated 2-Way Valve Ordering Information Saint-Cobain Performance Plastics-USA Polymer Products Saint-Gobain Performance Plastics-France Polymer Products **'^^^^V* Nanterre F-92000, France SAINT-GOBAIN lei: ii/{V) I 35 68 5y 5y_____ , . „ __. Furon'is a registered trademark. Fax: 33/(0) 1 55 68 59 68 PERFORMANCE PLASTICS FuseBond" is a trademark. 2-month Limited Warranty: For a period of 12 months from the date of first sale, Saint-Gobain Performance Plastics Corporation warrants this product to be free from defects in manufacturing. This company's only obligation will be to provide replacement product for any material proven to have such a defect, or at SGPPL's option, to refund the purchase price thereof. User assumes all other risks, if any including the risk of njury, loss or damage, whether direct, consequential or incidental, arising out of the use, misuse, or inability to use this product. SAINT-GOBAIN PERFORMANCE PLASTICS DISCLAINS ALL IMPLIED WARRANTIES OF MERCHANTABILITY AND FITNESS FOR A PARTICULAR PURPOSE. Saint-Gobain Performance Plastics reserves the right to change product specifications without prior notice._ NOTE: Saint-Gobain Performance Plastics Corporation does not assume any responsibility or liability for any advice furnished by it, or for the performance or results of any installation or use of the product or of any final product into which the product may be incorporated by the purchaser and/or user MCE 041 2.5M 0507 STAS WWW.microelectronicS.Saint-gobain.COITl ©2007 Saint-Gobain Performance Plastics Corporatior Furon RDVM & SMDVM 1" Self-Manifolding Distribution Valve Pneumatic or Manual Actuated 2-Way Valve Furon® high-purity, injection-molded RDVM and SMDVM Rolling Diaphragm Valves offer you a revolutionary new concept in high flow fluid handling systems. RDVM and SMDVM Valves combined with the Furon® Universal fitting system allows system integrators the unique ability to quickly configure and assemble custom valve manifolds utilizing standard off-the-shelf valves utilized as a stand-alone valve featuring a small footprint and high flow rate, or can be used in conjunction with the SMDVM. The SMDVM 2-way valve offers an additional 3rd or 4th port that multiple valves. The RDVM and SMDVM valves are ideal for use in high purity and aggressive chemical semiconductor applications including chemical delivery, chemical processing, and fluid handling applications. Outstanding performance the RDVM / SMDVM Valves make them highly recommended for bulk chemical delivery and valve box • High flow factor, Cv 15 (NC port) wetted flow path • Patented rolling diaphragm • Visual position indicator standard on manual and pneumatic versions • Quick-release, non-metallic • Non-gender, close coupled space saver fittings Furon RDVM Valve Furon SMDVM Valve

Furon Universal Fittings UTG Fittings Assembly Procedure Turn RDVM approximately 5 turns until the tongue and groove interface makes contact…then continue turning until valves are aligned. There should be 1/2 turn to clock valves (Clockwise) 2nd Valve: RDVM PN 1109177-002 (No Purge port) Thread UTG16SU Coupler, PN 1109225-003 into SMDVM NO (UTG) port until snug, approximately 4.5 - 5 turns, this will allow “clocking” of valves. Start with a Manual SMDVM PN 1109180-002 (No Purge port) Use MTG Plug PN: 1109616 in the MTG port you would like capped off. Thread the fitting into the valve body until...