FLUID HANDLINGSOLUTIONS FOR MICROELECTRONICS
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FLUID HANDLING SOLUTIONS FOR MICROELECTRONICS Furon® | Versilon™

PURITY PERFORMANCE INNOVATION Saint-Gobain Performance Plastics is a world renowned manufacturer of highperformance fluoropolymer products for the most demanding fluid handling applications. Through our Furon® and Versilon™ product lines, we offer unmatched solutions to meet your needs in demanding markets such as microelectronics, where high purity, safety, and reliability are critical. With a strong engineering focus on Research and Development, we pioneer application-specific material solutions and novel processing techniques for a wide variety of high-purity systems. Our experienced...

MANUFACTURING CAPABILITIES & EXPERTISE Saint-Gobain’s capabilities include extrusion, compression and injection, isostatic and endothermic molding for a wide range of polymers ranging from commodity grade resins to highly engineered polymers and fluoropolymers. Our extensive process knowledge coupled with assembly in a state-of-the art, build-clean environment and premium raw material ensures our products meet or exceed the most stringent cleanliness requirements of the Semiconductor and other highly demanding industries. • Superior flow performance • High pressure capability Wafer...

Our newest generation of Furon valves is constructed from high-purity, injection molded fluoropolymers including high-purity Perfluoroalkoxy (PFA). Our engineering expertise and patent-protected technologies allow us to provide the Semiconductor industry with valves that are 100% O-Ring free, metal free and/or maintenance free, ensuring optimal safety, system performance, and media purity. Pure Performance

High Temperature • 100 PSIG rated forward and back-pressure in 2-way & 3-way configuration • Metal-free & O-ring design • Furon SCR spring and bellows protection specifically rated for concentrated for HF & HCI and other aggressive applications • True dual containment with leak dection 2-Way & 3-Way 1/4”, 1/2”, 3/4” Flare Grip II Pillar Super 300 Fuse Bond Connection Size 1/4”, 3/8”, 1/2”, 3/4”, 1” Actuation Type Pneumatic Manual Multi-T urn Manual Quarter-T urn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 203°F (95°C) Temperature 356°F (180°C) (High Temp) Cv Factor 0.8 – 7.0...

InLine Valve Features/Benefits: • 15 Cv Flow Factor • Fully swept, low shear internal flow path • Quick-release, non metallic, 8-position mounting base • 100% PFA HP and Virgin PTFE wetted flow path 2-Way 1” Fuse Bond Flare Grip II 1/2“, 3/4”, 1”, 1-1/4” Pneumatic Manual Multi-T urn Max. Operating Pressure 100 PSIG (6.9 bar) Max. Operating 212°F (100°C) Temperature Cv Factor Up to 15 Leak Detection Port YES Chemical Delivery Configuration Orifice Size Standard Connection Types Connection Size Actuation Type 2” HGVM Valve 2-Way 2” Fuse Bond • Maximum flow rating of Cv 52 • Fully swept flow...

HPVM Valve Features/Benefits: • igh-purity PFA or PTFE wetted flow H path and PTFE diaphragm • 0 PSIG (5.5 bar) forward/back-pres 8 sure rating • vailable in pneumatic normally closed, A normally open, multi-turn, toggle and quarter-turn actuation Precision Dispense Slurry 2-Way or 3-Way 3/16”, 1/4” Flare Grip II Pillar Super 300 Fuse Bond Connection Size 1/8“, 1/4” 3/8” 1/2” , , Actuation Type Pneumatic Electrical, 24 VDC Manual Quarter-Turn Electrical, 115 VAC Manual Multi-Turn Max. Operating Pressure 80 PSIG (5.5 bar) Max. Operating 176°F (80°C) Temperature Cv Factor 0.5 – 0.8 Leak...

Mini Check Valve Features/Benefits: • • • • 100% high-purity PFA construction Cracking pressure less than 1 PSIG (0.07 bar) High-purity PFA spring O-ring free design Precision Dispense 2-Way 1/16” 1/8” 3/16” , , , 1/4” 3/8” , Standard Flare Grip II Connection Types Pillar Super 300 Connection Size 1/8” 1/4”, 3/8” 1/2” , , Actuation Type Media Max. Operating Pressure 120 PSIG (8.3 bar) Max. Operating 203°F (95°C) Temperature Cv Factor .1 – 1.90 Wafer Processing Configuration Orifice Size Large Check Valve Features/Benefits: High Temperature • 100% high-purity PFA construction • High flow...

Features/Benefits: • 100% high-purity PTFE and PFA wetted flow path • O-ring free design • 3-way valves available in both “L” and “T” configuration • Panel mount versions are available Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Leak Detection Port Metering Valve Features/Benefits: • 100% virgin PTFE wetted parts for high-purity and corrosion resistance • Fine thread on needle stem allows for precise metering and flow control • Bonnets and packing easily removable for cleaning • Straight...

Suckback Valve • All virgin PTFE/high-purity molded PFA wetted flow path • Eliminates dripping of dispense media from nozzles • Adjustable suckback capacity permits precise metering of dispense media • Repeatability of suckback amount allows identical dispense media over time High Temperature Precision Dispense Wafer Processing Configuration Orifice Size Standard Connection Types Connection Size Actuation Type Max. Operating Pressure Max. Operating Temperature Cv Factor Leak Detection Port Relief Valve Features/Benefits: • All virgin PTFE/high-purity molded PFA wetted flow path • Protects...

The Furon integrated manifold product line features multiple function components in a single, pre-tested package that is easily installed into your system. Saint-Gobain valves are engineered to provide exceptional durability and reliability and to deliver superior performance in countless combinations and configurations while providing an optimum cost of ownership for end user. Our dedicated manifold resources will support you in the development of all critical fluid applications. Every Furon integrated manifold system benefits from 100% fluoropolymer wetted flow paths and cleanroom...