PS4-MT3/15-R/N

Product catalog summary

General Description
The MonoTorr® Rare Gas and Nitrogen Purifier is designed for ultra-high purity gas supply in semiconductor applications. It uses a patented getter alloy to remove impurities such as O2, H2O, CO, CO2, H2, CH4, and N2 to low parts per billion levels. The purifier operates continuously until the getter cartridge needs replacement.

PS4 Phase II Controller Features

Life Status: Indicates purifier status (Good, Marginal, Change).
Heater: Displays heater status and maintains getter material temperature.
Valves: Controls purifier status via pneumatic valves.
Alarms: Alerts for pneumatic, power, and temperature issues, causing the purifier to enter Bypass mode if necessary.
Heater On/Off: Activates heater when no alarms are present.
Valve Control: Switches between Purifier and Bypass mode.
LED Check: Ensures proper LED and alarm buzzer function.
Acknowledge: Silences alarms and restores operation if conditions are corrected.

Process Gas Specifications

Maximum Flow Rate: MT3: 50 slpm, MT15: 75 slpm.
Nominal Flow Rate: MT3: 5 slpm, MT15: 15 slpm.
Minimum Flow Rate: MT3: 0.5 slpm, MT15: 1.0 slpm.
Maximum Inlet Pressure: 10.3 bar (~150 psig).
Max. Pressure Drop: < 1 bar (~14.5 psid) at 7 bar inlet pressure.
Inlet Gas Temperature Range: 0°C – 35°C (32°F – 95°F).
Outlet Gas Temperature: < 50°C (122°F).

Facilities Requirements – Electrical

Installed Power: Optional 120 VAC or 220 VAC with specific power consumption for MT3 and MT15 models.
Designed to operate with a 30mA GFI.

Facilities Requirements – General

Instrument Air Pressure: 5.5 bar (80 psig) - 6.9 bar (100 psig).
Ambient Temperature Range: 0°C – 35°C (32°F – 95°F).

Analytical Specifications

Outlet Impurity Levels: O2, H2O, CO, CO2 < 1 ppb; H2, N2, CH4 < 10 ppb at higher flow rates.

General Purifier Specifications

Dimensions: Height 86.4 cm, Width 20.3 cm, Depth 20.9 cm.
Weight: MT3: 23 kg, MT15: 28 kg.
Getter Bed Operating Temperature: Rare Gas 400°C, Nitrogen 350°C.
Heater Power Consumption: MT3: <125W / <260W, MT15: <187W / <600W.
Outlet Particle Filter: 0.003 μm absolute all metal type.
Valves: Three, ¼ inch diaphragm type, air actuated.
Thermocouple: Two, ungrounded, K type.
Control System: Discrete analog temperature controller with alarm and shut-down features.
Accessories: Includes VCR gaskets and fuses for different voltage options.
Applicable Codes & Standards: CE Marking.

Catalog excerpts

MonoTorr® Phase II, Rare Gas and Nitrogen Purifier, 50 and 75 slpm General Description The MonoTorr® Rare Gas and Nitrogen Purifier is a getter-based purifier designed specifically to provide ultra-high purity (UHP) gas for semiconductor applications. Outlet impurity levels for O2, H2O, CO, CO2, H2, CH4 and N2 (from Rare gas only) are reduced to low parts per billion (ppb) levels or below. The patented getter alloy operated at elevated temperatures, removes impurities by forming irreversible chemical bonds. Impurities will not be released under any circumstances when the purifier is operated within specification. The purifier will continuously supply ultra pure gas at rated flows provided that inlet impurities are within specified levels, until getter cartridge replacement is necessary. PS4 Phase II Controller Features • Life Status indicates the life status of the purifier. Good is normal, Marginal indicates approaching depletion and Change includes audible alarm to notify the operator that end-point is approaching and replacement will soon be required. Heater indicates status of heater. Temperature display heater mode while maintaining getter material at preset operating temperature. Valves indicate status of purifier as controlled by pneumatic valves. Alarms Pneumatic alarm caused by loss of adequate pressure for valves. Power alarm indicates that extended power failure has caused purifier to go into Standby condition. Temperature alarm indicates a high or low temperature condition in the purifier cartridge. High impurity levels (air) in the gas stream could cause the high temperature alarm. Alarm causes the purifier to go to Bypass mode. Additional error codes provide alarms for exhaust fan, heater or solid state relay failure. Heater On/Off activates heater only when no alarms exist. Valve Control positions valve to Purifier or Bypass mode.

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• LED Check assures proper functioning of all LEDs and alarm buzzer. • Acknowledge Silence audible alarm and restores operation if certain alarm conditions have been corrected.

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General Purifier Specifications

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PS4-MT3/15-R/N

PS4-MT3/15-R/N

Catalog excerpts

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