4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbV) levels or better. Optional valves and a 0.003 micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability. Uncompromised process consistency and yield improvement. Performance. State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability. Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality. 316L stainless steel, Helium leak checked, pressure tested, and analytical testing to Part-per-Trillion (pptv) levels. available through SAES Pure Gas Sales Network. Pressure Drop vs. Flow Rate Pressure DropVs. Flow Rate MC1, .003 micron, Nitrogen MC1 & MC50, 0.003 µm Particle Filter, tested in N2 3.5 Maximum Flow: 10 slpm† Nominal Flow: 1.5 slpm† Maximum Pressure: 1000 psig Consult factory for specific lifetimes † See reverse for Arsine & Phosphine flowrates 2.5 Pressure Drop (psid) p Support. Lifetime estimation and regeneration service Flow Rate (slpm) Ordering Information Example: MC50-902F Model: M d l MC50 Media: M di 902 Options No options F 0.003µm Particle Filter V Inlet/Outlet Valves FV Filter and Valves shown with optional valves inches [millimeters] Options: 0.003µm Particle Filt O ti 0 003 P ti l Filter Install Vertically with flow downward in direction of arrow. Consult factory for other mounting options.

4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 Mechanical Specifications Model Maximum Flow* Nominal Flow* 1.5 slpm† Body-316L Stainless Steel Integrated 0.003 micron, metal Outlet Length (Face to Face) Outside Diameter Electropolish Leak Rating *The 3 digit number found in the model number equates to the “Media” row in the table below. †Flowrates with 502 media: Arsine/Phosphine max= 4.0 slpm, nominal= 1.5 slpm. Purification and Removal Capabilities Gases Purified Outlet Performance Dangerous Goods (DG) Classification Impurities Removed Volatile Acids,...