4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbV) levels or better. Optional valves and a 0.003 micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability. Uncompromised process consistency and yield improvement. Performance. State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability. Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality. 316L stainless steel, Helium leak checked, pressure tested, and analytical testing to Part-per-Trillion (pptv) levels. Support. Lifetime estimation and regeneration service available through SAES Pure Gas Sales Network. Pressure Drop vs.vs. FlowRate Pressure Drop Flow Rate MC4500, .003 micron Filtration, tested MC4500, 0.003 µm Particle Filter, Nitrogen in N2 35 Consult factory for specific lifetimes Maximum Flow: 1000 slpm† Nominal Flow: 200 slpm† Maximum Pressure: 250 psig †See reverse for Filtered Options Pr ressure Drop (psid) 30 psig Inlet 60 psig Inlet p g Ordering Information Flow Rate (slpm) Options p No options No options F 0.003µm Particle Filter F 0.003µm Particle Filter V Inlet/Outlet Valves V Inlet/Outlet Valves FV Filter and Valves FV Filter and Valves HF 0 003µm Filter/High Flow HF 0.003µm Filter/High Flow 0.003µm HFV 0.003µm Filter/High HFV 0.003µm Filter/High Flow/With Valves Flow/With Valves Options: 0.003µm Particle Filter Options: 0.003µm Particle Filter shown with optional valves inches [millimeters] Install Vertically with flow downward in direction of arrow. Consult factory for other mounting opt

The Technology of Pure Gas 4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 Model ( )=Option Maximum Flow Nominal Flow 200 slpm 2.0 micron outlet metal Filter (Outlet) Material Valve (Option) Max Operating Pressure Max Temperature Rating Inlet Outlet Length (Face to Face) Outside Diameter Electropolish Leak Rating Weight *The 3 digit number found in the model number equates to the “Media” row in the table below. †”HF” = High Flow Filter option. Purification and Removal Capabilities Gases Purified Outlet Performance Dangerous Goods (DG) Classification...