SAES Pure Gas, Inc. The Technology of Pure Gas 4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbV) levels or better. Optional valves and a 0.003 micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability. Uncompromised process consistency and yield improvement. Performance. State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability. Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality. 316L stainless steel, Helium leak checked, pressure tested, and analytical testing to Part-per-Trillion (pptv) levels. available through SAES Pure Gas Sales Network. Pressure Drop vs. Flow Rate Pressure µm Vs. Flow Rate MC190 & MC200, 0.003Drop micron, Nitrogen tested in N2 Particle Filter, MC200-902F, .003 20 Support. Lifetime estimation and regeneration service Maximum Flow: 50 slpm† Nominal Flow: 5 slpm† Maximum Pressure: 250 psig Consult factory for specific lifetimes † See reverse for Arsine & Phosphine flowrates Pressure Drop (psid) Flow Rate (slpm) Ordering Information Example: MC200-902F Model: M d l MC200 Media: M di 902 Options No options F 0.003µm Particle Filter V Inlet/Outlet Valves FV Filter and Valves inches [millimeters] shown with optional valves Options: 0.003µm Particle Filt O ti 0 003 P ti l Filter Install Vertically with flow downward in direction of arrow. Consult factory for other mounting options.

SAES Pure Gas, Inc. The Technology of Pure Gas 4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 Model Maximum Flow Nominal Flow Material Filter (Outlet) Valves Max Operating Press Max Temperature Rating Inlet Outlet Length (Face to Face) Outside Diameter Electropolish Leak Rating Weight 50 slpm† 5 slpm† Body-316L Stainless Steel Integrated 0.003 micron, metal *The 3 digit number found in the model number equates to the “Media” row in the table below. †Flowrates with 502 media: Arsine/Phosphene max= 10.0 slpm, nominal= 5.0 slpm. Purification and Removal...