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MC1500

Product catalog summary

Specifications Overview
MicroTorr purifiers are designed for Point-of-Use (POU) gas purification, offering customizable solutions with gas-specific materials to achieve impurity removal to Part-Per-Billion (ppbV) levels or better. Optional features include valves and a 0.003 micron particle filter, with custom subsystem configurations available.

Competitive Advantages

Reliability: Ensures process consistency and yield improvement.
Performance: Features state-of-the-art purification technology with low pressure drop and long lifetimes.
Regenerability: Most media are factory regenerable, reducing hazardous waste.
Quality: Constructed with 316L stainless steel, helium leak checked, and pressure tested to Part-per-Trillion (pptv) levels.
Support: Lifetime estimation and regeneration services are available.

Mechanical Specifications
The MC1500 model offers a maximum flow of 250 slpm and a nominal flow of 40 slpm, with a maximum operating pressure of 250 psig at 40°C. It features a 0.003 micron integrated metal filter and is constructed from 316L stainless steel.

Purification Capabilities
The MC1500 model purifies various gases, removing impurities such as H2O, CO2, and volatile compounds to pptV levels. It supports multiple media options, each tailored to specific gases and impurities, with some media being regenerable.

Ordering Information
Model numbers are structured to indicate media type and options, such as filters and valves. For example, MC1500-902F indicates the MC1500 model with 902 media and a 0.003 µm particle filter.

Pressure Drop vs. Flow Rate
The document includes a graph showing the relationship between pressure drop and flow rate for the MC1500 model with a 0.003 µm particle filter, tested in nitrogen.

Additional Options
Piping options include dual purifier manifolds and various valve bypass configurations. Other model sizes are available, each with specific maximum and average flow rates.

Catalog excerpts

4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbV) levels or better. Optional valves and a 0.003 micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability. Uncompromised process consistency and yield improvement. Performance. State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability. Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality. 316L stainless steel, Helium leak checked, pressure tested, and analytical testing to Part-per-Trillion (pptv) levels. Pressure Drop vs. Flow Rate Pressure Drop Vs. Flow Rate MC1500, 0.003 µm Particle Filter, tested in N2 MC1500-202F, .003 micron, Nitrogen 8 Maximum Flow: 250 slpm† Nominal Flow: 40 slpm† Maximum Pressure: 250 psig available through SAES Pure Gas Sales Network. Support. Lifetime estimation and regeneration service † See reverse for Arsine & Phosphine flowrates Consult factory for specific lifetimes Pressure Drop (psig) 30 psig Inlet 5 60 psig Inlet 4 Flow Rate (slpm) Ordering Information Example: MC1500-902F Model: M d l MC1500 Media: M di 902 Options No options F 0.003µm Particle Filter V Inlet/Outlet Valves FV Filter and Valves Options: 0.003µm Particle Filt O ti 0 003 P ti l Filter shown with optional valves inches [millimeters] Install Vertically with flow downward in direction of arrow. Consult factory for other mounting options.

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The Technology of Pure Gas 4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 Mechanical Specifications Model Maximum Flow Nominal Flow Material Filter (Outlet) Valves Max Operating Pressure Max Temperature Rating Inlet Outlet Length (Face to Face) Outside Diameter Electropolish Leak Rating Weight 250 slpm† 40 slpm† Body-316L Stainless Steel Integrated 0.003 micron, metal *The 3 digit number found in the model number equates to the “Media” row in the table below. †Flowrates with 502 media: Arsine/Phosphine max= 70.0 slpm, nominal= 40.0 slpm. MC1500 Purification...

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MC1500

MC1500

Catalog excerpts

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