4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 MicroTorr purifiers are the most complete and reliable solution for Point-of-Use (POU) gas purification. Combining model size with a selection of gas-specific purification materials, MicroTorr purifiers can be tailored to many different customer applications, while maintaining impurity removal to Part-Per-Billion (ppbV) levels or better. Optional valves and a 0.003 micron particle filter are available as well as custom subsystem configurations. Competitive Advantages and Benefits: Reliability. Uncompromised process consistency and yield improvement. Performance. State-of-the-art purification technology, low pressure drop, and long lifetimes. Regenerability. Most MicroTorr media are factory regenerable, minimizing potentially hazardous waste. Quality. 316L stainless steel, Helium leak checked, pressure tested, and analytical testing to Part-per-Trillion (pptv) levels. Support. Lifetime estimation and regeneration service available through SAES Pure Gas Sales Network. Pressure Drop Vs. Flow Rate Pressure Drop vs. Flow Rate MC1, .003 micron, Nitrogen MC1 & MC50, 0.003 µm Particle Filter, tested in N2 Consult factory for specific lifetimes Maximum Flow: 5 slpm† Nominal Flow: 0.5 slpm† Maximum Pressure: 1,000 psig † See reverse for Arsine & Phosphine flowrates P Pressure Drop (psid) ( Flow Rate (slpm) Ordering Information Media Media Example: MC1-902F Example: MC1-902F Model: MC1 Media: 902 Model: M d l MC1 Media: M di 902 No options 0.003µm Particle Filter 0.003µm Particle Filter Inlet/Outlet Valves Inlet/Outlet Valves Filter and Valves FV Filter and Valves shown with optional valves inches [millimeters] Options: 0 003 0.003µm Particle Filter Particle Filter Options: 0.003µm P ti l Filt O ti Install Vertically with flow downward in direction of arrow. Consult factory for other mounting options.

4175 Santa Fe Road, San Luis Obispo, CA 93401 Tel: 1 (805) 541-9299 | Fax: 1 (805) 541-9399 Mechanical Specifications Model Maximum Flow Nominal Flow Valves Max Operating Pressure Max Temperature Rating Inlet Outlet Length (Face to Face) Weight Outside Diameter Electropolish Leak Rating Material Filter (Outlet) 1/4" FVCR 1/4" FVCR 8.91"±.05 [226.3mm±1.3] 2.6 lbs (1.2 kg) 1.50" [38.1mm] Yes 1x10-9 atm cc/sec of He Body-316L Stainless Steel Integrated 0.003 micron, metal *The 3 digit number found in the model number equates to the “Media” row in the table below. †Flowrates with 502 media: Arsine/Phosphine...