SAES Pure Gas The Technology of Pure Gas MonoTorr: Heated Getter Purifiers Applications • Vapor Deposition Processes • MOCVD • PVD • CVD • Epitaxy • Photolithography • Metrology • R&D laboratory experiments • LED • Crystal pulling • Implant • Etching • Diffusion and Oxidation processes • Annealing • Fiber Optics • Analytical • Solar and Photovoltaics MonoTorr Heated Getter Gas Purifiers Are ideal solutions for point-of-use purification where CH4 or N2 impurity removal is required. Gases purified include He, Ar, Xe, H2, and N2. The Heated Getter technology forms an irreversible bond with the impurities and removes them to sub-ppb levels. Unlike ambient purification technologies that rely on surface sorption only, heated getter technology utilizes the entire volume of material resulting in superior impurity capacity and longer purifier lifetime.

PS2-GC50: Typical Flow Rate 0 - 0.2 slpm Product Specifications: • 200 sccm maximum flow rate (Nitrogen, Helium, Argon) • Outlet gas temperature < 50° C • Average power consumption < 50 W • 20 pm metal particle filter Dimensions: • Height 23 cm (9 inches) • Width 10 cm (4 inches) • Weight 1.8 kg (4 lbs) Optional equipment: • 1/4” VCR fittings • 110-120 VAC or 220-240 VAC Product Specifications: • 5 slpm maximum flow rate (Nitrogen, Helium, Argon) • 3 slpm maximum flow rate (Xenon) • High temperature alarm • Outlet gas temperature < 50° C • Average power consumption < 50 W • 0.003pm metal particle...

Impurities Removed Product specifications: • MT3 (5 slpm Average Flow) • 50 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Hydrogen) • 3 slpm maximum flow rate (Xenon) • MT15 (15 slpm Average Flow) • 75 slpm maximum flow rate (Nitrogen, Helium, Argon) • 50 slpm maximum flow rate (Hydrogen) • 9 slpm maximum flow rate (Xenon) • High temperature alarm • Outlet gas temperature < 50° C • Average power consumption 125 W (MT3), 187 W (MT15) • 0.003pm metal particle filter • Life Status Sensor (Rare Gas and Nitrogen only) • Bypass assembly • Surface mountable enclosure...

Product Specifications • 150 slpm maximum flow rate (Hydrogen) • 100 slpm maximum flow rate (Nitrogen, Helium, Argon) • 30 slpm maximum flow rate (Xenon) • High temperature alarm • Outlet gas temperature < 50° C • Average power consumption 1.1 kW • 0.003pm metal particle filter • PLC controlled operation • Exhausted enclosure with separate electronics bay • Life status indicator Dimensions: • Height 113 cm (44.5 inches) • Width 53 cm (21 inches) • Depth 30 cm (12 inches) • Weight 70 kg (154 lbs) Optional equipment: • N2 purge system (Hydrogen model only) • Hydrogen leak detector (Hydrogen model...