This data sheet contains an overview and specification of the Renishaw RPI30 parallel interface. The RPI30 accepts differential analogue 1 Vpp sine/cosine signals, interpolates by 4096 and provides an output in parallel format with up to 36bits of position data being available. When used in combination with a double pass plane mirror interferometer system (PMI) (fundamental period of sinusoids is nominally 158 nm), this results in an LSB of 38.6 picometres at velocities of up to 2 m/sec. Active lissajous correction can be enabled to compensate for DC offset and AC mismatch from the laser encoder to improve the sub divisional error (SDE) to ±0.1 nm at low velocities. Optional connections for active feedthrough of the analogue quadrature (uncorrected) and RS422 full duplex diagnostics interface are provided. The parallel interface is similar to the RPI20 running at 3.0V (3.3V tolerant). Control and monitoring of the RPI30 is performed via an SPI interface in the parallel bus connector, options such as address, direction, resolution and lissajous correction are stored in EEPROM and loaded on power up. RPI30s can be configured before installation if no SPI interface is available. • Full error information and ability to reset errors independently of position Information available over the diagnostics (RS422) and control (SPI) interfaces includes: • Device information including version and serial number • ADC data at full resolution • Full range magnitude (signal strength) • Full resolution position independent of parallel interface settings • Parallel interface settings • Lissajous correction status • Lissajous correction setup and control • Internal datalogger which can capture position or ADC data up to the full 100 MHz inte

Performance Specification Values stated define the contribution of the RPI30 on the system performance, NOT the complete laser interferometer system performance. Measurement performance Plane mirror - PMI LSB resolution – user selectable Maximum speed Positional noise contribution (RMS) signal strength >25% < 38.6 pm SDE contribution (excluding RLE and without correction enabled) Velocity < 50 mm/s (PMI) Velocity < 100 mm/s (RRI) Signal strength > 25% SDE including RLE with correction enabled Velocity < 50 mm/s (PMI) Velocity < 100 mm/s (RRI) Signal strength > 50% Position data format Propagation...

Renishaw plc New Mills, Wotton-under-Edge Gloucestershire  GL12 8JR United Kingdom Encoder feedthrough Analogue quadrature Nominal 1V p-p into 120ohm termination Copy of encoder output, no SDE correction applied. Encoder error only. Velocity < 50 mm/s (PMI) Velocity < 100 mm/s (RRI) Signal strength > 25% Diagnostics UART Signal level Baud rate 1 start bit, 8 data bits, 1 stop bit, no parity Parallel bus Diagnostics UART Encoder feedthrough Encoder input RPI30 connectors For worldwide contact details, visit www.renishaw.com/contact RENISHAW HAS MADE CONSIDERABLE EFFORTS TO ENSURE THE CONTENT OF...