Systems of PVA TePla
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Be equipped for tomorrow‘s materials

The PVA TePla Group The companies of the PVA TePla Group develop and manufacture systems and components serving a broad range of markets globally for the treatment and finishing of high value materials and surfaces. The necessary processes take place mainly under: High temperatures PVA TePla AG together with its subsidiaries is a key player in the world for hard metal sintering systems, crystal-growing systems and plasma systems used for surface activation and ultra-fine cleaning. The equipment and services of PVA TePla enable important manufacturing processes and technological...

Industrial Systems Semiconductor Systems Solar Systems Equipment for treating and refining materials are manufactured in the Industrial Systems division. In vacuum, under controlled inert or in a reactive gas atmosphere with partial and high pressure or in plasma, the properties of the materials can be improved, their shape can be changed and parts of different materials can be brazed or diffusion bonded to each other. In the Semiconductor Systems division, PVA TePla offers a range of innovative high-tech equipment: systems for the production of silicon crystals for the semiconductor and...

Industrial Systems Vacuum Systems In the Vacuum Systems business unit, PVA TePla AG specializes in the design and construction of thermal systems developing, manufacturing and treating high-quality materials at high temperatures. With more than 50 years’ experience and an equipment install base of over 1,000 systems, the company is a global market leader especially for vacuum and pressure sintering systems. Sintering – in Vacuum and Pressure The vacuum sintering systems and the pressure sintering systems are designed for all applications relating to debinding and vacuum sintering, and the...

Heat Treatment and Special Systems Our vacuum systems are individually designed for a wide variety of processes in accordance with customer requirements. In addition, to the above-mentioned processes, these include reduction, carburizing, cleaning, tempering, degassing, coating, granulation, distillation, impregnation and drying. Systems for PulsPlasma® Nitriding and Plasma Activation Our subsidiary PlaTeG GmbH develops and produces plasma systems for a wide range of industrial applications. Systems for PulsPlasma® Nitriding PulsPlasma® nitriding is a thermo-chemical heat treatment for the...

Semiconductor Systems Crystal Growing Systems PVA TePla is a key equipment supplier for the semiconductor industry. The company offers all industrially relevant methods for crystal growth, particularly for monocrystalline silicon crystals. Crucible-Pulling-from-the-melt-Method (Czochralski-Cz) – EKZ Type We offer Cz-systems for pulling silicon and germanium crystals for wafer manufacture for the semiconductor industry. Equipment for the growth of crystal diameters of up to 450 mm are available. Vertical Gradient Freeze (VGF) Method – Kronos Type For compound semiconductors in the...

Plasma Systems Low-pressure plasma systems for customer-specific solutions are designed and manufactured by this business unit. With gas plasma, surfaces can be functionalized on a nano-scale level or cleaned with excellent precision. Without the use of environmentally unfriendly wet chemistries we offer our customers the entire range of atmospheric and low-pressure gas plasma technologies which utilize both microwave (Mw) and radio frequency (Rf) excitation for the following markets and applications: Semiconductor Our core competence in this area is the removal (ashing) and processing of...

Analytical Systems By this business unit a number of measuring systems for nondestructive quality inspection with unique methods and analysis software is offered. Laserbased Wafer Metrology Systems These fully automated systems are capable of handling wafer sizes of up to 300 mm. The equipment is used for quality control in semiconductor production fabs globally in two main areas of application: for measuring critical shear stresses in silicon wafers, and for measuring the uniformity of ion implantation processes. Acoustic Scanning Microscopes Ultrasound electron scanning microscopes have a...

Solar Systems The Solar Systems division primarily builds crystallization equipment for silicon ingot manufacturing for solar cell application. MonoCrystallizer - Czochralski (Cz) Method for Mono Crystal Ingots Our crystallization equipment features advanced crystallization processes and offers our customers high yield and low cost materials. MultiCrystallizer - Vertical Gradient Freeze (VGF) Method for Multi Crystal Ingots The VGF-furnace features advanced process versatility for the casting of multicrystalline material. The equipment offers very high throughput and has been designed with...

Contact Details Industrial Systems: Vacuum Systems: PVA TePla AG E-mail info @ pvatepla.com PulsPlasma® Nitriding and Plasma Activation: PlaTeG GmbH E-mail service@plateg.de info @ pvatepla.com Semiconductor Systems: Crystal Growing Systems: Plasma Systems: Semiconductor PVA TePla AG Plasma Systems Life Science / Industry PVA TePla America Inc.

Analytical Systems: Laserbased Wafer Metrology Systems PVA TePla AG Acoustic Scanning Microscopes PVA TePla Analytical Systems GmbH Vapour Phase Decomposition Systems Munich Metrology GmbH info @ pvatepla.com Solar Systems:

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