SR Series
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Catalog excerpts

PVAC TfePlaSR-110 Semiconductor Systems

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SR -110 Technical Data Main Features of the Slim Rod Puller SR-110 • Independent Dual rod pulling • Pull lengths up to 3.2 meters • pper and lower chambers separated by a U high vacuum gate valve which allows harvest of the slimrods without disturbing the melt on the source rods in the lower chamber. RF-Generator RF output power: 15 kW RF frequency: 2.8 MHz Power control: SCR-power thyristor trig­ ered g by pulse trans­ ormers f Oscillator valve: water-cooled ceramic type ITK 15-2 The floor area required for the complete set-up including generator, closed loop cooling system, vacuum/gas...

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