FZ 14-M
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Catalog excerpts

Semiconductor Systems

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The Polysilicon Floatzone Test GrowerMain features of the FZ-14M Crystal Crystal diameter: Crystal length: Pulling speed crystal: Upper/Lower Spindle Pulling length: Fast travel speed: Spindle rotation: RF-Generator RF output power: max. 18 kW Vacuum system End vacuum: 2.5 ■ 10E - 5 mbar Leak rate: < 1 ■ 10E - 3 mbar l / sec Weight approx. 2,500 kg (net) The weight includes the high frequency generator and control panel. Pressure Operating pressure: 0 to 3 bar absolute Argon Quantity operation: Quantity quick fill: Pressure: Quality: Cooling water • Mechanically clean (mesh...

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