EKZ 3500
2Pages

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Catalog excerpts

EKZ 3500 - 2

EKZ 3500 Our sophisticated Czochralski-Puller for the mass production of silicon crystals up to 300 mm diameter Technical Data Puller Data Crucible diameter: Crystal diameter: Crystal length: Charge size: Vessel diameter: Vessel height: Gate valve diameter: Receiving chamber: Weight (Puller): Weight (power cabinet): Weight (control cabinet): up to 610 mm (24“) up to 300 mm up to 2.5 m up to 200 kg approx. 940 mm approx. 1,680 mm up to 360 mm door/tube approx. 9,000 kg approx. 1,400 kg approx. 360 kg Crucible drive unit Lifting speed: Stroke: Rotation speed: 0.02 … 200 mm / min approx. 600...

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