EKZ 3000
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Catalog excerpts

Semiconductor Systems

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EKZ 3000 State of the art crystal puller for 300 mm technology Technical Data Dimensions (approx.) Puller Data Crucible Ø : Crystal Ø : Crystal length: Charge size: Vessel Ø : Vessel height: Gate valve Ø : Gate chamber design: up to 915 mm (36”) up to 300 mm up to 2,100 mm up to 300 kg 1,320 mm (1,250 mm) 2,185 mm 500 mm door Crucible drive unit Lifting speed (process): Lifting speed (positioning): Rotation speed: Crucible lift: 0.025 - 4 mm / min 2.5 - 400 mm / min 0.1- 20 rpm approx. 970 mm Height (shaft) 12,700 mm (cable) 8,800 mm Width 2,500 mm Depth 2,500 mm Weight (puller, shaft...

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