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T-I Max Next-Generation AMC Monitors

T-I Max Next-Generation AMC Monitors
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T-I Max Next-Generation AMC Monitors - 1

T-I Max Next-Generation AMC Monitors GASES & CHEMICALS Based on Tiger Optics’ new global platform, the T-I Max series monitors for Airborne Molecular Contaminants (AMCs) deliver unprecedented performance, including: z Sensitive, absolute measurement technique, using Cavity Ring-Down Spectroscopy (CRDS) z Dramatically improved speed of response z Parts-per-trillion detection limits z Drift-free, with calibration traceable to the world’s leading reference labs z Lowest Cost of Ownership and maintenance Next-Generation Trace Gas Analyzers for Detection & Continuous Monitoring of Airborne Molecular Contaminants in Semiconductor Cleanrooms You can spend a long time “looking” for Airborne Molecular Contaminants (AMCs) when the catastrophic product performance or yield loss is discovered at your device final test stage; or you can deploy Tiger Optics’ T-I Max series analyzers to locate and to monitor these invisible defect generators, commonly found lurking in and around equipment, personnel, wafer carriers and cleanroom bays. In today’s advanced semiconductor processing, the residual gases, vapors and chemicals emanating from the various materials, accelerated processing operations, and substrate storage and transport have become a critical concern. So much so that the International Technology Roadmap for Semiconductors (ITRS) now highlights AMC contamination as a key technical challenge in achieving & sustaining low defect rates on devices. With a particular focus on the major contributors to the “chemical contamination” element of AMCs, the T-I Max series, based on Tiger’s new analyzer platform, can detect and continuously monitor HF, HCl, and NH3 with an unprecedented combination of sensitivity, selectivity, and speed of response. Tiger Optics’ GO-cart for AMCs adds additional flexibility by providing a mobile platform that can be moved quickly to different critical m

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T-I Max Next-Generation AMC Monitors - 2

Performance Operating range Dimensions Standard sensor Detection limit (LDL, 3σ@100s) See table below Sensor rack Standard sensor 10% to 90% RH (non-condensing) Sample conditions (both excl. vacuum pump) Alarm indicators Storage temperature Electrical and Interfaces 2 user programmable Gas Handling System and Conditions* Wetted materials Optimized for ppt-level AMCs and fast speed of response Power requirements 1/4” PFA Swagelok® inlet & outlet Power consumption Inlet pressure Atmospheric pressure† Signal output Outlet pressure User interfaces Flow rate Sample gases Data storage Internal or...

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T-I Max Next-Generation AMC Monitors - 3

Tiger Optics GO-cart™ Surveying different micro-environments in a fab is now fast and easy with Tiger Optics’ mobile GO-cart. It can be equipped with any combination of T-I Max units to monitor simultaneously for the most critical contaminants in cleanroom air. The GO-cart is easy to move around the fab and comes with the following features: z Space for up to three T-I Max analyzers with lowpower, fanless vacuum pumps z Top-mounted central control touchscreen z Integrated back-up power supply (optional) z Conductive ESD paint (optional) Annual Performance Verification z Low-cost and easy...

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