RGA
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Catalog excerpts

PRODUCT NOTE

RGA - Residual Gas Analyzer The Extrel RGA is a reliable, easy-to-use residual gas analyzer that includes full range pressure measurement. An intelligent start-up design allows for the system to know when to switch from the Pirani to the ion gauge and finally to the quadrupole system. The Extrel RGA is a high performing RGA at an affordable price, which makes the system an ideal choice for Background Gas Analysis, Leak Detection and Vacuum Chamber Characterization. RGA Advantages: • Modular compact design for ease of installation and maintenance • Full pressure measurement with built-in...

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Overview The RGA100 and RGA300 are the ultimate residual gas measurement probes. A single device, mounted on a 2-3/4 inch flange, contains a Pirani gauge, an ion gauge and a quadrupole mass analyzer. All Extrel models start at 1 amu. The RGA100 goes to 100 amu and the RGA300 goes to 300 amu. Long-Life Dual Filaments and Ion Source Kits Dual thoria-coated iridium filaments are used for electron emission for both the quadrupole and ion gauge operation. The filaments are protected against stress from vacuum excursions by both the ion and the Pirani functions. Because of these protections, our...

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Trend Mode The peak intensities of up to 10 ions of interest can be followed as a function of time. Peaks to be monitored are set in a Mass Table where mass, description, dwell time for acquisition, color of trace, high and low alarms can be set. The user has full control over how the data is displayed and exported. Relative Standard Deviations in terms of normalized concentrations: N2: 0.27%, O2: 1.20%, Ar: 1.26%, CO2: 2.86% Leak Detection Mode It is just a matter of placing the gas of choice into the table. The intensity trace of the leak detection peak is then shown on the graph. Leak...

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RGA VacuumPlus Software All Extrel RGA systems come standard with the VacuumPlus Real-Time Windows® software package. An intuitive graphical user interface makes the total functionality of the Extrel system available to the user. Complete pump-down may be monitored quickly and easily. For further analysis, XML data files (text format) can be saved for transfer into spreadsheets, and graphic images can be save or copied into other Windows programs. Powerful Operational Modes The VacuumPlus software comes with the operation modes of Analog Sweep mode, Trend mode, Leak Detect mode and...

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RGA Specifications Mass Range: Electron Emission Current: 0.2 to 5 mA, programmable Probe Dimension: Mass Filter Type: 6 mm Quadrupole Detector Type: • Faraday cup only or with Electron Multiplier Resolution: Better than 0.5 amu (adjustable) • 172.52 mm (6.79 inches) from flange face to top of ionizer CCU Extension: • 139.65 mm (5.50 inches) from flange face Minimum Tube I.D.: • 31.75 mm (1.25 inches) probe mounting Sensitivity (A/Torr): 5 x 10-4 A/Torr Minimum Detectable Partial Pressure: Full Pressure Measurement: • Pirani Gauge: > 10-2 Torr Maximum Operating Temperature: 50°C • 81.99 mm...

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