Extrel MAX-QMS System MAX System Mass Range and Performance Resolution General System Quadrupole Operating Mass Relative (M /rM Sensitivity Mass Filter Frequency Range Transmission FWHM) (mA/ Torr) Insertion Length: 406.1 mm (15.99 inches) Axial Ionizer: 48.6 mm (1.91 inches) Minimum Tube I.D.: 97.5 mm (3.84 inches) Mass Filter: 219.1 mm (8.63 inches) Note: Performance specifications shown here are minimum production test requirements. Actual performance may be better. Insertion Length: 415.5 mm (16.36 inches) Axial Ionizer: 48.6 mm (1.91 inches) Merlin CS & QPS Mass Filter: 228.6 mm (9.00 inches) Module Function/Connections n I/O Connections - 16 Digital I/O, 6 Analog Inputs, 20 Analog Outputs (optional) n Baseboard 3 Relay Connections n 1 Ion Gauge Connection Minimum Tube I.D.: 97.5 mm (3.84 inches) DC Voltage and Mass Command for Mass Filter Pole DC Supply n RF Oscillator Connection Quadrupole Probe Assembly Hardware Item Configurations Axial Molecular Beam Ionizers Options: n Aperture or Sampling Cone Flat n Solid or Mesh Shield n Tungsten or Thoriated Ionizer Iridium Filaments RGA Ionizer n Aperture, Mesh Shield, Flat Tungsten Filaments Cross Beam Deflector Ionizers Options: n Aperture or Sampling Cone Flat n Solid or Mesh Shield n Tungsten or Thoriated Iridium Filaments Tandem Ionizer, Energy Analyzer Options: n Aperture or Sampling Cone Flat n Solid or Mesh Shield n Tungsten or Thoriated Iridium Filaments Cross Beam Ionizers for Photo Ionization n Solid Shield with Tungsten or Thoriated Iridium Filaments 9.5 mm (3/8 inches) or 19 mm (3/4 inches) Tri-Filter Mass Filter Quadrupole n Solid or Vented Housing Mass Filter n Entrance and Exit Lenses Electron Impact Filament Power Supply n Filament Supply Filament Connection n Ionizer Heater Signal Data Data System and Raw n Preamp Computer Interface n Vacuum Interlock n Data System Optics Raw Supply n Optics Source Voltages Optics Supply Outputs n Optics Module 2 +/- 100 VDC Lens Boards n 4 +/- 400 VDC Lens Boards Bipolar Dynode Module Bipolar Multiplier Module Dynode Power Supply Electron Multiplier Power Supply MAX System Preamplifier Options Counting Electron Multiplier with Conversion Dynode ≤ 90 cps Noise at 2800 VDC in (-)Ion Mode Detector Low Noise CEM with Conversion Dynode ≤ 3 cps Noise at 2800 VDC in (-)Ion Mode 100 CF (6 inches) or 150 CF (8 inches) Mounting Flange n 35 mm Axial Glass Viewport Mounting n Feedthroughs for Single Quad RF Flange n Single 10-Pin Feedthrough (Other Configurations Available) Item Standard Preamplifier Analog or Positive Ion Pulse Counting Options n None n Analog and Positive Ion Pulse Counting n Positive and Negative Ion Pulse Counting Extrel CMS maintains sales and service offices around the world. Please contact us for the office nearest you or visit our website at www.extrel.com. Extrel ® is a registered trademark of Extrel CMS, LLC. Merlin Automation is a trademark of Extrel CMS, LLC. MAX-CS™ is a trademark of Extrel CMS, LLC. MAX-QMS™ is a trademark of Extrel CMS, LLC. Windows is a registered trademark of Microsoft Co. © 2015 Extrel CMS, LLC Quadrupole Mass Spectrometer

Extrel MAX-QMS System Extrel MAX-QMS System The Extrel ® MAX-QMS Systems are UHV-compatible flange mounted Quadrupole Mass Spectrometers. Merlin Automation Data System Software Features The Ionizer, Quadrupole Mass Filter and Detector on a mounting flange are designed for inclusion in your experimental vacuum chamber. The MAX-QMS mass spectrometer consists of the rack mountable QPS (Quadrupole Power Supply), MAX-CS command system, and the Merlin Automation Data System Software. The MAX-QMS Systems are based on Extrel’s industry-leading mass spectrometer technology centered around our range of...