HALO KA H2O Ultra-High Purity Gas Analyzer GASES & CHEMICALS Compact, affordable and powerful, the HALO KA H2O brings you: z Parts per trillion (ppt) moisture detection capability in an array of gases z Small footprint (two HALO KAs fit in a 19” rack) z Absolute measurement (freedom from calibration) z Low cost of ownership and great ease of use z Wide dynamic range—over four orders of magnitude z Clean technology z NOW INCLUDED: Speed+ performance upgrade—intelligent dynamic data processing boosts analyzer’s speed of response while maintaining low noise performance An analytical solution that’s right on time The HALO KA H2O packs a punch in one all- zero verification. The HALO KA H2O specializes in included, compact and affordable package. Using trace-level moisture detection in bulk gases and Tiger Optics’ renowned time-based technology— specialty gases, as well as gas mixtures, including Cavity Ring-Down Spectroscopy (CRDS)—you can germane (GeH4) in hydrogen and other specialty verify moisture impurity levels down to 100 ppt in mixtures used in semiconductor manufacturing. helium, with drift-free stability and virtually instant response. You’ll find our system exceptionally fast to install, easy to use and effortless to maintain, with built-in Pair the HALO KA H2O with the HALO OK for pptlevel oxygen measurement to enjoy the benefits of laser-based technology for both of these critica

HALO KA H2O Ultra-High Purity Gas Analyzer Standard sensor Detection limit (LDL, 3σ/24h) See table on next page Sensor rack Environmental conditions Standard sensor Operating range See table on next page 30% to 80% RH (non-condensing) Storage temperature Electrical and Interfaces Platform Gas Handling System and Conditions Wetted materials Alarm indicators (corrosive gas version optional) 10 Ra surface finish Gas connections Power requirements 1/4” male VCR inlet and outlet Power consumption Signal output User interfaces Inlet pressure Flow rate Sample gases Most inert, toxic, passive Speed+...

HALO KA H2O Ultra-High Purity Gas Analyzer OXYGENATED GASES RARE GASES CORROSIVE GASES FLUORINATED GASES HYDRIDE GASES INERT/ PASSIVE GASES *Corrosive gas version required †Corrosive gas version recommended for H O concentration that could exceed 1 ppm 2 Contact us for additional analytes and matrices. U.S. Patent # 7,277,177 Tiger Optics, LLC 275 Gibraltar Road, Horsham, PA 19044 Phone: +1 (215) 656 4000 • Fax: +1 (215) 343 7168 sales@tig