TopMap Micro.View®+ optical modular profiler
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TopMap Micro.View®+ / Micro.View®+ Compact TopMap Micro.View®+ is the next generation optical surface profiler. Designed for modularity, this comprehensive workstation allows for customized and application-specific configurations. The Micro.View®+ delivers the most detailed analysis of surface roughness, texture and microstructure topography. Combine 3D data with color information for amazing vizualizations and extended analysis like detailed documentation of defects. The high-resolution 5 MP camera delivers incredibly detailed 3D data vizualization of engineered surfaces. The encoded and motorized turret secures a seamless transition between objectives. Micro.View®+ features the latest Focus Finder plus Focus Tracker, keeping the surface in focus at all circumstances. The fully motorized sample positioning stages allow for stitching and automation. ■ High-end white-light interferometer with nm resolution ■ 100 mm z measurement range with CST Continuous Scanning Technology ■ With Focus Finder and Focus Tracker ready for automation ■ Motorized X, Y, Z, tip/tilt and turret save repositioning ■ Color information mode for extended analysis and documentation of defects ■ Modular, application-specific configurations

I Fair ll g Data sSheet Complies with the initiative "Fair Data Sheet" for optical surface measurement devices With optional XY-positioning stage Phase evaluation According to the initiative "Fair Data Sheet", 30 measurements (10x objective, 11.3 pm/sec, 92% FOV) on a parallelly aligned plane mirror (R > 93%, X/10). Postprocessing: alignment, 5 x 5 median filter with threshold 3 nm (phase evaluation)/40 nm (envelope evaluation), high pass filter Xc = 0.25 mm According to DIN EN ISO 25178-604:2013-12 30 measurements (10x objective, 11.3 pm/sec, 92% FOV with 3x3 median filter) on a parallelly...

Evaluation of the correlogram phase Evaluation of the correlogram envelope Complies with the initiative “Fair Data Sheet" for optical surface measurement devices Mean value of the flatness (according to ISO 1101) from 30 measurements (10x objective, 11.3 pm/sec, 92% FOV) on a parallely aligned plane mirror (R>93%, X/10). Postprocessing: Alignment, 5x5 median filter with threshold 3 nm (phase evaluation)/30 nm (envelope evaluation), low pass filter Xc=0.02mm Standard deviation of the measured flatness values from 4 15 measurements (10x objective, 11.3 pm/sec) per step on a calibrated depth...

Configuration of the optical profiler Micro.View®+ Micro.View®+ sensor head, standard or 5 MP camera, with or without color information, with or without focus finder Micro.View®+ Compact Messkopf optional AF mit Focus Finder Motorized or RGBRGB manual turret Motorized or manual turret GREEN GREEN GREEN GREEN Objectives Different positioning stages, manual XY or motorized XY 75 mm x 75 mm, including tip-tilt Positioning stage motorized XY 200 mm x 200 mm, manual or motorized tip-tilt BGR NEERG Base stand Spacers for sample heights up to 370 mm Active vibration isolation breadboard Optical...