MSA-650 IRIS Micro System Analyzer MSA-650 IRIS Micro System Analyzer Optical characterization of dynamics inside Si-capped MEMS Product brochure

Highlights IR capability to measure MEMS dynamics through different layers of Si-capped devices Real-time out-of-plane response measurement up to 25 MHz (w/o post-processing) Sub-picometer out-of-plane displacement resolution Superior separation of the individual device layers Stroboscopic video microscope to measure in-plane motion up to 2.5 MHz Automated system that integrates well for production (probe station compatibility) Optical characterization of dynamics inside Si-capped MEMS Dynamic characterization of MEMS devices to measure and visualize mechanical response is important for product...

Probe station integration for wafer-level measurement Wafer level testing requires the MSA measurement head to be combined with a probe station. Whether it’s necessary to test devices prior to packaging or to perform routine quality control measurements directly on the wafer, the MSA-650 IRIS can be mounted onto virtually all commercially available wafer probe stations. the dynamic behavior of all MEMS devices right on a wafer. That way, you can achieve a high throughput and have a key tool for monitoring the production process. Wafer-level testing prior to chip separation allows the sorting...

For encapsulated MEMS – modal testing and optical vibration measurement Laser Doppler vibrometry (LDV) is a well-esta blished technique to study the mechanical dy namics of MEMS with utmost precision. Most laser vibrometers work at visible wavelengths for which the silicon encapsulation is opaque and inhibits MEMS inspection. Thus, LDV testing of such MEMS via visible wavelengths requires either un-encapsulated MEMS or decapping the device. However, the step of MEMS capping in fabrication processes may result in additional stress, which might alter the device performance. Therefore, a comprehensive...

Use the leading technology in vibration analysis In order to use Laser Doppler vibrometry (LDV) for a look into encapsulated MEMS, it is necessary to study the optical properties of silicon. While silicon is opaque for visible light, it shows a good transmission in the near- infrared range starting at around 1050 nm. A limitation for transmission however, is the high refractive index of around 3.4 at 1550 nm leading to considerable Fresnel reflections at boundary interfaces. Under the assumption that the MEMS is structured with one silicon cap above the relevant MEMS surface and the interfaces...

Real-time vibration analysis Scanning laser Doppler vibrometry (SLDV) provides non-contact, real-time measurements of velocity and displacement on a grid of selected measurement points. This allows characterization of out-of-plane vibrational behavior of a dedicated layer inside a si-capped device. Unique features include the ability to acquire data with (sub-)picometer displacement resolution, to capture frequency response up to 25 MHz, and to analyze non-linear systems. How it works The laser Doppler vibrometer (LDV) is a precision optical transducer for measuring the vibration velocity and...

Intuitive and powerful data analysis and evaluation Our built in signal analysis software provides frequency response over the entire frequency bandwidth without the need to know the resonance frequencies in advance. The intuitive software package provides a built in signal generator to drive the device using a wide range of excitation wave forms, and the ability to analyze time domain, FFT, Zoom FFT, averaged and peak hold data. Operational deflection shapes (ODS) are visualized as impressive full field, 3D animations from the frequency response function (FRF) data. An open programming interface,...

Planar motion analysis Stroboscopic video microscopy provides a powerful method for the measurement and true motion visualization of the in-plane dynamics of microstructures. To precisely measure the planar motion of the device under test, a combination of stroboscopic SWIR illumination, digital imaging and pattern tracking is applied. Thus motions of fast moving objects can be sharply frozen in time to capture and track the exact position of a region of interest (ROI) on the specimen. How it works Stroboscopic video microscopy for in-plane motion detection employs a special kind of stroboscopic...

Laser Doppler vibrometry combined with in-plane stroboscopy The combination of two complementary measurement techniques to investigate the vibrational behavior of small structures provides superior performance. The highly sensitive laser Doppler technique can rapidly find all in-plane and outof-plane resonances from broadband excitation. In a second step, the stroboscopic video microscopy technique is used to obtain accurate amplitude and phase information of in-plane resonances identified by laser vibrometry. Unknown resonance peaks can be found in a broadband frequency response spectrum without...

Portal stand Analysis software Sensor head F ront-end with function gene rator and data management system (DMS)

Accessories tailored to your needs Application-specific stand solutions Automated sample positioning and measurement The MSA-I-650 IRIS Sensor Head Sensor Head can be mounted on Polytec test stands or commercially available probe stations. Polytec offers both manual and automatic focus versions of the test stand with integrated z stages. Polytec stands are available with vibration isolated workstations or can be installed on user supplied optical tables. Objects that are larger than the field of view can be measured. An automated xy translation stage enables sequential measurements that are stitched...

Shaping the future since 1967 OM_PB_MSA-650_IRIS_E_52117 2021/07 - Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn