MSA-600 Micro System Analyzer // In-plane and out-of-plane motion up to 8GHz plus topography analysis
MSA-600 Micro System Analyzer // In-plane and out-of-plane motion up to 8GHz plus topography analysis
The MSA-600 Micro System Analyzer is an advanced optical measurement workstation designed for analyzing the dynamic response and topography of MEMS and microstructures. It provides real-time vibration, planar motion, and surface topography analysis to optimize device performance and manufacturing processes.
- Real-time response measurement up to 2.5 GHz, extendable to 8 GHz with the MSA-600-S model.
- Sub-picometer displacement resolution for high precision.
- Automated system compatible with production environments.
- Integration with MEMS/wafer probe stations for enhanced productivity.
- Real-time Vibration Analysis: Uses laser Doppler vibrometry for out-of-plane vibrations with sub-picometer resolution and frequency response up to 8 GHz.
- Planar Motion Analysis: Utilizes stroboscopic video microscopy for in-plane motion with nanometer displacement resolution.
- Surface Topography Analysis: Employs scanning white-light interferometry for 3D topography with sub-nanometer vertical resolution.
- Optimizing device functionality by measuring real-time response behavior.
- Improving manufacturing processes through detailed evaluation of device parameters.
- Testing MEMS reliability and service life under simulated conditions.
- Sorting MEMS for critical applications by examining dynamic spectrum.
- GHz testing for high-frequency micro-electro mechanical filters.
- Rapid identification and visualization of system resonances and static topography.
- Easy integration and operation, reducing measurement cycle time.
- Accelerates product development and troubleshooting.
- Real-time vibration analysis with scanning laser Doppler vibrometry.
- Planar motion analysis with stroboscopic video microscopy.
- Surface topography analysis with coherence scanning interferometry.
The MSA-600 offers flexible configurations with options for out-of-plane laser vibrometry, planar motion analysis, and static topography. It supports upgrades for extended bandwidth and additional measurement capabilities.
- 8 GHz operational capability for optical measurements.
- Solid portal stand with motorized z-axis for sensor head support and focusing.
- XY positioning stage with tip-tilt unit for sample fine-adjustment and stitching.
- 4-channel data acquisition with signal analyzer.
- Optional function generator for higher GHz range.
- Air-damped or electronically controlled vibration isolation table.
- Integration with probe stations for wafer-level measurement.
- MSA vibration measurement on semi-automatic vacuum probe station.
- Wafer-level testing allows sorting out of defective dies early in the production process, maintaining high yield and quality levels.
- Determining the thickness of pressure sensor membranes by analyzing frequency spectrum.
- Measuring stress to qualify the expected service life of MEMS devices.
- High throughput testing for monitoring production processes.
- Provides direct mechanical response measurements, complementing standard electrical test procedures.
- Helps in maintaining low production costs while ensuring high quality.
- Enables efficient and quick measurement of dynamic behavior of MEMS devices directly on a wafer.
For further details, contact Polytec GmbH, Germany, or visit their website at www.polytec.com.
Catalog excerpts
MSA-600 Micro System Analyzer MSA-600 Micro System Analyzer Measuring dynamic response and topography of MEMS and microstructures Product brochure
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The all-in-one solution Measuring dynamic response and topography of MEMs and microsystems Polytec's MSA-600 Micro System Analyzer combines three highly sophisticated measuring techniques in one instrument. This provides comprehensive investigation of microstructures in a single workstation. Real-time characterization of out-of-plane (OOP) vibrations by laser Doppler vibrometry to frequencies up to 2.5 GHz and with a displacement resolution down to the (sub-)picometer level Characterization and live-mode1 visualization of in-plane motion by stroboscopic video microscopy to frequencies up to 2.5...
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Advancing microsystems of tomorrow Your MSA benefits for R&D and production applications R apid identification and visualization of both system resonances and static topography Integrated optimized microscope for best lateral resolution and highest image quality Simplify model validation E asy integration with MEMS/wafer probe stations Validate and refine your FE simulations using highly precise experimental data. Laser Doppler vibrometers are established tools for quickly and reliably measuring the mechanical response of MEMS devices to electrical and physical stimuli. Non-contact optical measurement...
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Special workstation Real-time vibration analysis for the GHz e, regime availabl contact us. Scanning laser Doppler vibrometry (SLDV) provides non-contact, real-time measurements of velocity and displacement on a grid of selected measurement points. This allows characterization of out-of-plane vibrational behavior. Unique features include the ability to acquire data with (sub-)picometer displacement resolution, to capture frequency response up to 2.5 (8) GHz, and to analyze non-linear systems. Highlights Dynamic response (vibration) measurement of velocity and/or displacement Full-field vibration...
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Planar motion analysis Stroboscopic video microscopy provides a powerful method for the measurement and true motion visualization of the in-plane dynamics of microstructures. To precisely measure the planar motion of the device under test, a combination of stroboscopic illumination, digital imaging and pattern tracking is applied. Thus motions of fast moving objects can be sharply frozen in time to capture and track the exact position of a region of interest (ROI) on the specimen. Highlights CAMERA Easily measure and visualize in-plane motions TUBE LENS LED FLASH BEAM SPLITTER Extract displacement...
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Surface topography analysis When designing or manufacturing microsystems, structured surfaces require precise verification of surface topography to assure quality and performance. Due to its excellent spatial resolution the Micro System Analyzer’s topography measurement unit is ideally suited for the 3D profile analysis of microstructures. Topography of automotive pressure sensors (Melexis) Highlights CAMERA Analyze microstructures with excellent vertical and lateral resolution TUBE LENS Rapid, non-contact 3D topography measurement on rough (scattering) or smooth (specular) surfaces Measurement...
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Flexible and upgradeable configurations The main advantage of the MSA-600 is the “all-in-one” solution. The MSA-600 Micro System Analyzer can be configured with the combination of out-of-plane laser vibrometry, planar motion analysis or static topography as required for testing. Whether single or combined tasks are needed, Polytec can provide the correct solution. For out-of-plane laser vibrometry, the system can be configured for either single beam or dual beam, differential operation. The differential systems provide an additional second reference beam to subtract out base or background motion,...
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Specialized 8 GHz testing solution Probe station integration for wafer-level measurement Wafer level testing requires the MSA measurement head to be combined with a probe station. Whether it’s necessary to test devices prior to packaging or to perform routine quality control measurements directly on the wafer, the MSA-600 can be mounted onto virtually all commercially available wafer probe stations. Wafer-level production quality control The MSA-600-S is the premiere specialized optical measurement workstation allowing vibration analysis and surface characterization up to 8 GHz! Use the MSA-600-S...
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Shaping the future since 1967 OM_PB_MSA-600_E_52035 2025/03 - Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn
Open the catalog to page 9All Polytec catalogs and technical brochures
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