MSA-600 Micro System Analyzer MSA-600 Micro System Analyzer Measuring dynamic response and topography of MEMS and microstructures Product brochure

The all-in-one solution Measuring dynamic response and topography of MEMs and microsystems Polytec's MSA-600 Micro System Analyzer combines three highly sophisticated measuring techniques in one instrument. This provides comprehensive investigation of microstructures in a single workstation. Real-time characterization of out-of-plane (OOP) vibrations by laser Doppler vibrometry to frequencies up to 2.5 GHz and with a displacement resolution down to the (sub-)picometer level Characterization and live-mode1 visualization of in-plane motion by stroboscopic video microscopy to frequencies up to 2.5...

Advancing microsystems of tomorrow Your MSA benefits for R&D and production applications R apid identification and visualization of both system resonances and static topography Integrated optimized microscope for best lateral resolution and highest image quality Simplify model validation E asy integration with MEMS/wafer probe stations Validate and refine your FE simulations using highly precise experimental data. Laser Doppler vibrometers are established tools for quickly and reliably measuring the mechanical response of MEMS devices to electrical and physical stimuli. Non-contact optical measurement...

Special workstation Real-time vibration analysis for the GHz e, regime availabl contact us. Scanning laser Doppler vibrometry (SLDV) provides non-contact, real-time measurements of velocity and displacement on a grid of selected measurement points. This allows characterization of out-of-plane vibrational behavior. Unique features include the ability to acquire data with (sub-)picometer displacement resolution, to capture frequency response up to 2.5 (8) GHz, and to analyze non-linear systems. Highlights Dynamic response (vibration) measurement of velocity and/or displacement Full-field vibration...

Planar motion analysis Stroboscopic video microscopy provides a powerful method for the measurement and true motion visualization of the in-plane dynamics of microstructures. To precisely measure the planar motion of the device under test, a combination of stroboscopic illumination, digital imaging and pattern tracking is applied. Thus motions of fast moving objects can be sharply frozen in time to capture and track the exact position of a region of interest (ROI) on the specimen. Highlights CAMERA Easily measure and visualize in-plane motions TUBE LENS LED FLASH BEAM SPLITTER Extract displacement...

Surface topography analysis When designing or manufacturing microsystems, structured surfaces require precise verification of surface topography to assure quality and performance. Due to its excellent spatial resolution the Micro System Analyzer’s topography measurement unit is ideally suited for the 3D profile analysis of microstructures. Topography of automotive pressure sensors (Melexis) Highlights CAMERA Analyze microstructures with excellent vertical and lateral resolution TUBE LENS Rapid, non-contact 3D topography measurement on rough (scattering) or smooth (specular) surfaces Measurement...

Flexible and upgradeable configurations The main advantage of the MSA-600 is the “all-in-one” solution. The MSA-600 Micro System Analyzer can be configured with the combination of out-of-plane laser vibrometry, planar motion analysis or static topography as required for testing. Whether single or combined tasks are needed, Polytec can provide the correct solution. For out-of-plane laser vibrometry, the system can be configured for either single beam or dual beam, differential operation. The differential systems provide an additional second reference beam to subtract out base or background motion,...

Specialized 8 GHz testing solution Probe station integration for wafer-level measurement Wafer level testing requires the MSA measurement head to be combined with a probe station. Whether it’s necessary to test devices prior to packaging or to perform routine quality control measurements directly on the wafer, the MSA-600 can be mounted onto virtually all commercially available wafer probe stations. Wafer-level production quality control The MSA-600-S is the premiere specialized optical measurement workstation allowing vibration analysis and surface characterization up to 8 GHz! Use the MSA-600-S...

Shaping the future since 1967 OM_PB_MSA-600_E_52035 2025/03 - Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn