MSA-060 Micro System Analyzer MSA-060 Micro System Analyzer Full-field vibration measurement on small parts & microstructures Product brochure

Highlights Compact vibration measurement system with laser precision Real-time response measurement up to 24 MHz Picometer out-of-plane displacement resolution Easy setup and documentation with integrated HD+ camera Powerful DAQ incl. reference channel and signal generator Scanning option with motorized xy-stage Software for comprehensive data analysis and animation of deflection shapes The MSA-060 Micro System Analyzer is a compact optical measurement system for the comprehensive assessment of the vibrational behavior of MEMS and microsystems, dynamics of precision mechanics and reliability...

Application areas MEMS Whether they are sensors or actuators, the characteristics of MEMS are critical for their performance. The understanding and optimization of their operation are key steps in the development process. Typical MEMS devices under test are motion sensors, micromirrors, microphones, speakers and environmental sensors. The MSA-060 with its microscopic measurement spot size enables fast and efficient assessments of microstructure dynamics in a single shot resolved in the nm range. It also allows scanning entire sample surfaces with xy-stage for measuring deflection shapes over...

Shaping the future since 1967 OM_PB_MSA-060_E_52148 2023/05 – Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn