MSA-060 Micro System Analyzer | Full-field vibration measurement on small parts & microstructures
MSA-060 Micro System Analyzer | Full-field vibration measurement on small parts & microstructures
The MSA-060 Micro System Analyzer is a compact optical measurement system designed for assessing the vibrational behavior of MEMS, microsystems, and precision mechanics. It is particularly useful in early R&D phases and quality control applications, offering non-contact, full-field vibration analysis.
Key Features
- Real-time vibration measurement up to 24 MHz with picometer resolution.
- Integrated HD+ camera for easy setup and documentation.
- Powerful data acquisition system with reference channel and signal generator.
- Optional motorized xy-stage for scanning entire sample surfaces.
- Comprehensive software for data analysis and animation of deflection shapes.
Applications
The MSA-060 is suitable for testing various MEMS devices such as motion sensors, micromirrors, microphones, speakers, and environmental sensors. It is also applicable in industries like semiconductor, biomedical, watchmaking, and aerospace for characterizing dynamic properties and reliability of precision mechanics.
Modularity and Flexibility
The system offers modularity with options for different microscope objectives and tripod mounting, allowing for flexibility in positioning and testing both micro and meso-scaled samples.
Data Acquisition and Evaluation
The system supports up to 24 MHz data acquisition, with a reference channel and signal generator for standalone use. The software provides advanced data analysis, visualization, and animation capabilities.
Conclusion
The MSA-060 Micro System Analyzer is a versatile and powerful tool for researchers and industry professionals, offering precise and comprehensive vibration analysis for a wide range of applications.
Catalog excerpts
MSA-060 Micro System Analyzer MSA-060 Micro System Analyzer Full-field vibration measurement on small parts & microstructures Product brochure
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Highlights Compact vibration measurement system with laser precision Real-time response measurement up to 24 MHz Picometer out-of-plane displacement resolution Easy setup and documentation with integrated HD+ camera Powerful DAQ incl. reference channel and signal generator Scanning option with motorized xy-stage Software for comprehensive data analysis and animation of deflection shapes The MSA-060 Micro System Analyzer is a compact optical measurement system for the comprehensive assessment of the vibrational behavior of MEMS and microsystems, dynamics of precision mechanics and reliability...
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Application areas MEMS Whether they are sensors or actuators, the characteristics of MEMS are critical for their performance. The understanding and optimization of their operation are key steps in the development process. Typical MEMS devices under test are motion sensors, micromirrors, microphones, speakers and environmental sensors. The MSA-060 with its microscopic measurement spot size enables fast and efficient assessments of microstructure dynamics in a single shot resolved in the nm range. It also allows scanning entire sample surfaces with xy-stage for measuring deflection shapes over...
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Shaping the future since 1967 OM_PB_MSA-060_E_52148 2023/05 – Technical specifications are subject to change without notice. High tech for research and industry. Pioneers. Innovators. Perfectionists. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany Polytec-Platz 1-7 · 76337 Waldbronn
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