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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement
1 /8Pages

Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement

Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement
1 /8Pages

Catalog excerpts

Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-1

TopMap Pro.Surf & Pro.Surf+ / Datasheet Fast and large area profiling of 3D form & flatness

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-2

TopMap Pro.Surf and Pro.Surf+ are production-ready optical profilers for traceable and ultra-fast quality control measurements. Analyze 3D form parameters and flatness with utmost repeatability, capturing ~2M data points within just seconds. The exceptionally large single field with 44 x 33 mm² misses no details, while True Stitching secures accurate data of up to 230 x 220 mm². Automatic pattern recognition enables fast and efficient multi-sample measurements without the need for mechanical fixture. Reach recessed areas and inner surfaces with telecentric optics, covering up to 70 mm large steps....

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-3

Technical data // The information for the models TopMap Pro.Surf and TopMap Pro.Surf+ comply with the Fair Data Sheet (VDI/VDE-EE 2655-3) for optical surface measurement devices. Additional specs are highlighted in grey. General features Working principle Coherence scanning interferometry Nominal vertical measurement range in a single measurement Positioning range of workpiece 1 automated and motorized options Max. number of measuring points in a single measurement Max. number of measuring points in a stitched measurement Surface reflectivity SST Smart Scanning Technology works on any surface...

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-4

Optics-specific features Small field Large field Measurement area in a single measurement Extended lateral measurement range (stitching) 1 Maximum undirectional Usable vertical measuring range [mm] 70 70 Maximum workpiece height [mm] 70 70 Theoretical maximum measurable 2.18° 1.15° Measuring point spacing Ax/Ay [pm] 14.3 28.2 Calculated lateral optical resolution 8.4 16 1 With optional XY-positioning stage 2 According to Rayleigh criterion, related to a central wavelength of 525 nm

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-5

Optics-specific features Small field Large field Measurement noise NM1,2 < 0.5 nm Maximum deviation of a step height 5 pm step: 0.02 pm Step height measurement repeatability 4 1 Evaluation of the correlogram phase 2 Based on DIN EN ISO 25178-700, 30 („Smooth surfaces”)measurements at 11.9 pm/sec, on a parallelly aligned optical flat (R - 4%, X/20). Postprocessing: levelling, 5 x 5 spike-removal, high pass filter Xc = FoV width/4, no denoising 3 8 measurements per step at 11.9 pm/s, on a calibrated PTB depth-setting standard, type KNT A1 (ISO 5436-1), in various sections of the 70 mm nominal vertical...

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-6

Pro.Surf sensor head Pro.Surf sensor head with stand Pro.Surf+ sensor with stand and XY positioning stage Pro.Surf sensor head XY positioning stage Pro.Surf with stand Pro.Surf+ with stand approx. 25 kg approx. 22 kg approx. 57 kg approx. 69 kg Recommended temperature range 20 ±3 °C for measurement Permissible temperature gradient Operation/storage temperature Relative humidity Power consumption Additional sensor with TopMap Pro.Surf+ Nominal vertical measurement range 400 pm Working principle Chromatic-confocal

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Datasheet TopMap Pro.Surf // Large area 3D form & flatness measurement-8

Germany HQ, Waldbronn China Beijing France Châtillon India Pune Japan Kanagawa South-East Asia Singapore measure what matters. worldwide. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany · Polytec-Platz 1-7 · 76337 Waldbronn 42405/2026/04 - Technical specifications are subject to change without notice.

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