TopMap Micro.View / Datasheet

TopMap Micro.View® is an easy to use and compact optical profiler. Combine exceptional performance and affordability with this Coherence Scanning interferometer. The extended 100 mm large Z measurement range with Continuous Scanning Technology (CST) measures microstructures and textures of precision surfaces with sub-nm resolution. The convenient table-top setup features integrated electronics, with the advanced Focus Finder simplifying and speeding up the measurement procedure. Benefit from the optional ECT Environmental Compensation Technology, enabling reliable and accurate measurement results...

The information for the optical profiler TopMap Micro.View® complies with the Fair Data Sheet (VDI/VDE-EE 2655-3) for optical surface measurement devices. Additional specs are highlighted in grey. c Sheet General features Working principle ^m Coherence scanning interferometry Nominal vertical measurement range 100 mm in a single measurement Positioning range of workpiece 1 X = 100 mm, Y = 100 mm, Z = 100 mm; motorized Tip/tilt automated and motorized options Max. number of measuring points N: 1352; N: 1000; N : 1352000 Max. number of measuring points N = 500 million Surface reflectivity SST Smart...

Objective-specific features Measurement area in a single measurement X [mm] Extended lateral measurement range (stitching) 1 Maximum undirectional length [mm] Usable vertical measuring range 3 [mm] 9.2 10.3 Maximum workpiece height [mm] 22.5 60 Theoretical maximum measurable 0.86° 4.30° Measuring point spacing Ax/Ay [pm] 9.76 2.34 Calculated lateral optical resolution 21.35 4.27 1 With optional XY-positioning stage 3 Limited by objective working distance and workpiece geometry 4 According to Rayleigh criterion, related to a central wavelength of 525 nm

Objective-specific features Maximum deviation of a step height measurement 75 pm step: 0.3 pm 5 75 pm step: 0.7 pm 5 20000 pm step: 5.0 pmStep height measurement 75 pm step: 1.6 %repeatability 7 75 pm step: 0.2 %20000 pm step: 0.003 %Flatness deviation zFLT1 < 5 nmFlatness measurement repeatability 1 < 0.5 nm 1 Evaluation of the correlogram phase 2 Based on DIN EN ISO 25178-700, 30 („Smooth surfaces”) measurements at 17.2 pm/sec, on a parallelly aligned plane mirror (R > 93%, X/10). Postprocessing: levelling, 5 x 5 spike-removal, high pass filter Xc = FoV width/4, no denoising 3 According to...

General specifications Recommended temperature range for measurement Permissible temperature gradient Operation/storage temperature Relative humidity Power consumption 1 With optional 75 mm XY-positioning stage

AF of the AFoptical profiler // Configuration RGB GREEN RGB RGB AF AF Micro.View® sensor head option: Focus Finder Objectives 0.6X .. 111X, manual 5 port turret Base stand Different positioning stages: 20 / 75 / 100 mm, tip/tilt, manual/ motorized Active vibration isolation breadboard

Germany HQ, Waldbronn China Beijing France Châtillon India Pune Japan Kanagawa South-East Asia Singapore measure what matters. worldwide. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany · Polytec-Platz 1-7 · 76337 Waldbronn 52062/2026/04 - Technical specifications are subject to change without notice.