TopMap Micro.View+ / Datasheet

TopMap Micro.View®+ is a closed loop surface profiler with unrivalled repeatability. Designed for modularity, this comprehensive workstation allows for customized and application-specific configurations, handling up to 370 mm tall samples. The Micro. View®+ delivers crisp 3D topography data of surface roughness, texture and microstructures or MEMS with sub-nm resolution. Phase-shifting sharpens results especially on ultra smooth surfaces. Combine 3D data with Color View for enhanced documentation and visualization. The encoded and motorized 5 port turret secures an automated transition between...

The information for the optical profiler TopMap Micro.View®+ complies with the Fair Data Sheet (VDI/VDE-EE 2655-3) for optical surface measurement devices. Additional specs are highlighted in grey. c Sheet Working principle Coherence scanning interferometry Positioning range of workpiece 1 Micro.View+ Compact Micro.View+ Compact Micro.View+ Compact X = 200 mm, Y = 200 mm, Z = 100 mm; motorized X = 100 mm, Y = 100 mm, Z = 100 mm; motorized X = 75mm, Y = 75 mm, Z = 100 mm; motorized X = 20 mm, Y = 20 mm, Z = 100 mm; manual Tip/tilt automated and motorized options Max. number of measuring points...

Objective-specific features Measurement area in a single measurement X [mm] Extended lateral measurement range (stitching) 1 Maximum area [mm2] Maximum undirectional length [mm] Micro.View+ Compact Usable vertical measuring range 3 [mm] 9.2 Maximum workpiece height 4 [mm] 22.5 Numerical aperture Theoretical maximum measurable surface angle 9max Measuring point spacing Ax/Ay [pm] Calculated lateral optical resolution SL 5 [pm] 1 With optional XY-positioning stage 3 Limited by objective working distance and workpiece geometry 4 Standard system, height spacers optional 5 According to Rayleigh criterion,...

Objective-specific features Maximum deviation of a step height measurement 75 pm step: 0.1 pm 5 75 pm step: 0.1 pm 5 20000 pm step: 3.0 pm 1 Evaluation of the correlogram phase 2 Based on DIN EN ISO 25178-700, 30 („Smooth surfaces”) measurements at 11.3 pm/sec, on a parallelly aligned plane mirror (R > 93%, X/10). Postprocessing: levelling, 5 x 5 spike-removal, high pass filter Xc = FoV width/4, no denoising 3 According to DIN EN ISO 25178-604:2013-12, 30 measurements at 11.3 pm/s (10x objective) on a parallelly aligned plane mirror (R > 93%, X/10). Postprocessing: levelling, 3x3 median filter...

General specifications Sensor head Weight Controller Stand 1 Sensor head 2 Recommended temperature range for measurement Permissible temperature gradient Operation/storage temperature Relative humidity Micro.View+ Micro.View+ Compact integrated into stand 26 kg 12.8 kg Power consumption 1 With optional 75 mm XY-positioning stage

Configuration of the optical profiler // Micro.View®+ Compact Sensor head with Focus Finder. Option: Color View Motorized or RGB manual 5 port turret Sensor head with Focus Finder. Option: Color View Motorized or manual 5 port turret Different positioning stages: 20 / 75 / 100 mm, tip/tilt, manual/ motorized Different positioning stages: 200 mm, tip/tilt, manual/ motorized Base stand Spacers for sample heights up to 370 mm Active vibration isolation platform Optical table, pneumatically or electronically isolated

Germany HQ, Waldbronn China Beijing France Châtillon India Pune Japan Kanagawa South-East Asia Singapore measure what matters. worldwide. Find your Polytec representative: www.polytec.com/contact Polytec GmbH · Germany · Polytec-Platz 1-7 · 76337 Waldbronn 52130/2026/04 - Technical specifications are subject to change without notice.